Trends of MEMS-Based Vibration Energy Harvester

Micro vibration energy harvesters have received much attention due to their potential application of low power wireless sensor networks and embedded systems. This paper studies three mechanisms to scavenge the ambient vibration energy, discusses the power management circuit and the application of the converter, investigates the prospective development and ongoing challenges in MEMS-based vibration energy harvester.

[1]  Chengkuo Lee,et al.  A new S-shaped MEMS PZT cantilever for energy harvesting from low frequency vibrations below 30 Hz , 2012 .

[2]  R. B. Yates,et al.  Analysis Of A Micro-electric Generator For Microsystems , 1995, Proceedings of the International Solid-State Sensors and Actuators Conference - TRANSDUCERS '95.

[3]  Jan M. Rabaey,et al.  A study of low level vibrations as a power source for wireless sensor nodes , 2003, Comput. Commun..

[4]  Robert Langer,et al.  In vivo delivery of BCNU from a MEMS device to a tumor model. , 2005, Journal of controlled release : official journal of the Controlled Release Society.

[5]  P. Woias,et al.  An energy-autonomous self-tunable piezoelectric vibration energy harvesting system , 2011, 2011 IEEE 24th International Conference on Micro Electro Mechanical Systems.

[6]  J.M. Conrad,et al.  A survey of energy harvesting sources for embedded systems , 2008, IEEE SoutheastCon 2008.

[7]  Ali Muhtaroglu,et al.  An Electromagnetic Micro-Power Generator for Low Frequency Vibrations with Tunable Resonance , 2011 .

[8]  Heath Hofmann,et al.  Adaptive piezoelectric energy harvesting circuit for wireless, remote power supply , 2001 .

[9]  Othman Sidek,et al.  A review of vibration-based MEMS piezoelectric energy harvesters , 2011 .

[10]  Kwang-Seok Yun,et al.  A wideband energy harvesting device using snap-through buckling for mechanical frequency-up conversion , 2010, 2010 IEEE 23rd International Conference on Micro Electro Mechanical Systems (MEMS).

[11]  Gerald Holweg,et al.  A passively powered BAW-based multi-standard in-tire identification and monitoring system , 2010, 2010 7th International Symposium on Communication Systems, Networks & Digital Signal Processing (CSNDSP 2010).

[12]  Mohd Haris Md Khir,et al.  Analysis of frequency up-conversion based vibration energy harvesting , 2011, 2011 IEEE Regional Symposium on Micro and Nano Electronics.

[13]  Nan-Chyuan Tsai,et al.  Human powered MEMS-based energy harvest devices , 2012 .

[14]  Heath Hofmann,et al.  Adaptive piezoelectric energy harvesting circuit for wireless remote power supply , 2002 .