论文信息 - Effects of backstreaming and real or virtual leaks on the vacuum contamination in a turned-off turbomolecular pumped uhv system - 字舞流文

Effects of backstreaming and real or virtual leaks on the vacuum contamination in a turned-off turbomolecular pumped uhv system

S. Bhatt | N. Venkataramani | H. Pathak

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