Detum error separating method of cylindricity instrument based on self characteristic reference
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The present invention belongs to the technical field of precision measurement instruments. Referring more particularly to a self having a self-calibration feature and cylindrical measuring instrument error separation between the combined reference method. The method of the present invention is measured using a single sensor, by placing the workpiece in forward and backward placed two rounds, through simple data processing, the workpiece itself can be isolated shape error spindle pivot axis relative to the guide rail tilt amount, the tilt amount can completely remove the influence of ultra-precision measurement of the cylindrical shape of the cylindrical shape measuring space than the average level of precision motion reference spatial motion precision an order of magnitude than the reference.