论文信息 - Noble gas influence on reactive radio frequency magnetron sputter deposition of TiN films - 字舞流文

Noble gas influence on reactive radio frequency magnetron sputter deposition of TiN films

M. Futsuhara | O. Takai | M. Braic | C. Lungu | G. Musa

[1] T. Chou,et al. Characterization of titanium nitride thin films , 1990 .

[2] C. Ribbing,et al. Optimizing optical properties of reactively sputtered titanium nitride films , 1990 .

[3] J. Simmons,et al. Low temperature radio frequency sputter deposition of TiN thin films using optical emission spectroscopy as process monitor , 1994 .