Internal dielectric transduction: optimal position and frequency scaling
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[1] V. Kaajakari,et al. Electrostatic transducers for micromechanical resonators: free space and solid dielectric , 2006, IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control.
[2] R. Howe,et al. Silicon nitride-on-silicon bar resonator using internal electrostatic transduction , 2005, The 13th International Conference on Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05..
[3] Roger T. Howe,et al. INTERNAL ELECTROSTATIC TRANSDUCTION FOR BULK-MODE MEMS RESONATORS , 2004 .
[4] Sheng-Shian Li,et al. Vibrating micromechanical resonators with solid dielectric capacitive transducer gaps , 2005, Proceedings of the 2005 IEEE International Frequency Control Symposium and Exposition, 2005..
[5] S. Gevorgian,et al. dc field and temperature dependent acoustic resonances in parallel-plate capacitors based on SrTiO3 and Ba0.25Sr0.75TiO3 films: Experiment and modeling , 2006 .
[6] G. Liub,et al. THE RADIAL BULK ANNULAR RESONATOR : TOWARDS A 50 Ω RF MEMS FILTER , 2003 .
[7] Tsu-Jae King,et al. The radial bulk annular resonator: towards a 50/spl Omega/ RF MEMS filter , 2003, TRANSDUCERS '03. 12th International Conference on Solid-State Sensors, Actuators and Microsystems. Digest of Technical Papers (Cat. No.03TH8664).
[8] B. Auld,et al. Acoustic fields and waves in solids , 1973 .
[9] C. Nguyen. MEMS technology for timing and frequency control , 2005, IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control.