Design principles for six degrees-of-freedom MEMS-based precision manipulators

In the future, the precision manipulation of small objects will become more and more important for appliances such as data storage, micro assembly, sample manipulation in microscopes, cell manipulation, and manipulation of beam paths by micro mirrors. At the same time, there is a drive towards miniaturized systems. Therefore, Micro ElectroMechanical Systems (MEMS), a fabrication technique enabling micron sized features, has been researched for precision manipulation. MEMS devices comprise micro sensors, actuators, mechanisms, optics and fluidic systems. They have the ability to integrate several functions in a small package. MEMS can be commercially attractive by providing cost reduction or enabling new functionality with respect to macro systems. Combining design principles, a mature design philosophy for creating precision machines, and MEMS fabrication, a technology for miniaturization, could lead to micro systems with deterministic behavior and accurate positioning capability. However, in MEMS design trade-offs need to be made between fabrication complexity and design principle requirements. Therefore, the goal of this research has been twofold: 1. Design and manufacture a 6 Degrees-of-Freedom (DOFs) MEMS-based manipulator with nanometer resolution positioning. 2. Derive principle solutions for the synthesis of exact kinematic constraint design and MEMS fabrication technology for multi DOFs precision manipulation in the micro domain.

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