Suppressed sidewall injection magnetotransistor with focused emitter injection and carrier double deflection

We present a new linear magnetic field sensor (MFS) made in standard CMOS technology with a sensitivity of 1.26 percent/mT (1 percent/T ≡ 0.01 T-1). The device is a dual-collector lateral magneto-transistor (LMT) with suppressed injection of the emitter sidewalls, confinement of the injection to the center bottom of the emitter-base junction, and double deflection of carriers. Desirable collector current levels can be set without major loss of sensitivity by choosing from a wide range of operating points.

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