Development Trends and Perspectives of Future Sensors and MEMS/NEMS

With the fast development of the fifth-generation cellular network technology (5G), the future sensors and microelectromechanical systems (MEMS)/nanoelectromechanical systems (NEMS) are presenting a more and more critical role to provide information in our daily life. This review paper introduces the development trends and perspectives of the future sensors and MEMS/NEMS. Starting from the issues of the MEMS fabrication, we introduced typical MEMS sensors for their applications in the Internet of Things (IoTs), such as MEMS physical sensor, MEMS acoustic sensor, and MEMS gas sensor. Toward the trends in intelligence and less power consumption, MEMS components including MEMS/NEMS switch, piezoelectric micromachined ultrasonic transducer (PMUT), and MEMS energy harvesting were investigated to assist the future sensors, such as event-based or almost zero-power. Furthermore, MEMS rigid substrate toward NEMS flexible-based for flexibility and interface was discussed as another important development trend for next-generation wearable or multi-functional sensors. Around the issues about the big data and human-machine realization for human beings’ manipulation, artificial intelligence (AI) and virtual reality (VR) technologies were finally realized using sensor nodes and its wave identification as future trends for various scenarios.

[1]  Chengkuo Lee,et al.  Investigation of a Vacuum Encapsulated Si-to-Si Contact Microswitch Operated From −60 °C to 400 °C , 2015, Journal of Microelectromechanical Systems.

[2]  Ashiqur Rahaman,et al.  Bio-Inspired Rectangular Shaped Piezoelectric MEMS Directional Microphone , 2019, IEEE Sensors Journal.

[3]  Jianxiong Zhu,et al.  Asymmetric disappearance and periodic asymmetric phenomena of rocking dynamics in micro dual-capacitive energy harvester , 2018 .

[4]  Chengkuo Lee,et al.  Viscosity and density decoupling method using a higher order Lamb wave sensor , 2014 .

[5]  B. Snyder,et al.  A sensitive optical micro-machined ultrasound sensor (OMUS) based on a silicon photonic ring resonator on an acoustical membrane , 2015, Scientific Reports.

[6]  Deepak Uttamchandani,et al.  A MEMS microphone inspired by Ormia for spatial sound detection , 2018, 2018 IEEE Micro Electro Mechanical Systems (MEMS).

[7]  Dimitri Galayko,et al.  A nonlinear MEMS electrostatic kinetic energy harvester for human-powered biomedical devices , 2015 .

[8]  Zhong Lin Wang,et al.  Keystroke dynamics enabled authentication and identification using triboelectric nanogenerator array , 2018 .

[9]  Chunsheng Yang,et al.  High performance bimorph piezoelectric MEMS harvester via bulk PZT thick films on thin beryllium-bronze substrate , 2017 .

[10]  José Pascual Molina,et al.  Identifying Virtual 3D Geometric Shapes with a Vibrotactile Glove , 2016, IEEE Computer Graphics and Applications.

[11]  Dacheng Xu,et al.  Frequency Symmetry Comparison of Cobweb-Like Disk Resonator Gyroscope With Ring-Like Disk Resonator Gyroscope , 2019, IEEE Electron Device Letters.

[12]  Chengkuo Lee,et al.  NEMS diaphragm sensors integrated with triple-nano-ring resonator , 2011 .

[13]  Roy H. Olsson,et al.  On/Off micro-electromechanical switching of AlN piezoelectric resonators , 2013, 2013 IEEE MTT-S International Microwave Symposium Digest (MTT).

[14]  Xiaoping Liao,et al.  MEMS-Based Thermoelectric–Photoelectric Integrated Power Generator , 2019, Journal of Microelectromechanical Systems.

[15]  Xiao Hu,et al.  Out-of-plane electret-based MEMS energy harvester with the combined nonlinear effect from electrostatic force and a mechanical elastic stopper , 2015 .

[16]  Jin Ning,et al.  A T-Shape Aluminum Nitride Thin-Film Piezoelectric MEMS Resonant Accelerometer , 2019, Journal of Microelectromechanical Systems.

[17]  Chengkuo Lee,et al.  Fabrication and Characterization of a Vacuum Encapsulated Curved Beam Switch for Harsh Environment Application , 2014, Journal of Microelectromechanical Systems.

[18]  Qiongfeng Shi,et al.  From flexible electronics technology in the era of IoT and artificial intelligence toward future implanted body sensor networks , 2019, APL Materials.

[19]  Ashwin A. Seshia,et al.  A vacuum packaged surface micromachined resonant accelerometer , 2002 .

[20]  Chengkuo Lee,et al.  Wafer-Level Hermetic Bonding Using Sn/In and Cu/Ti/Au Metallization , 2009, IEEE Transactions on Components and Packaging Technologies.

[21]  Zaichun Feng,et al.  Numerical modeling of dynamic response of miniature multi-impact electromagnetic device for low and wide range frequencies energy harvesting , 2018, Proceedings of the Institution of Mechanical Engineers, Part C: Journal of Mechanical Engineering Science.

[22]  Chengkuo Lee,et al.  Nanoelectromechanical torsion switch of low operation voltage for nonvolatile memory application , 2010 .

[23]  Giorgia Pastorin,et al.  Toward Self‐Powered Wearable Adhesive Skin Patch with Bendable Microneedle Array for Transdermal Drug Delivery , 2016, Advanced science.

[24]  A. Danner,et al.  Design of narrow band photonic filter with compact MEMS for tunable resonant wavelength ranging 100 nm , 2011 .

[25]  Chengkuo Lee,et al.  All-Dielectric Surface-Enhanced Infrared Absorption-Based Gas Sensor Using Guided Resonance. , 2018, ACS applied materials & interfaces.

[26]  Xiang Qian,et al.  Wearable Pulse Wave Monitoring System Based on MEMS Sensors , 2018, Micromachines.

[27]  Chengkuo Lee,et al.  Zero-Bending Piezoelectric Micromachined Ultrasonic Transducer (pMUT) With Enhanced Transmitting Performance , 2015, Journal of Microelectromechanical Systems.

[28]  Sungho Kang,et al.  Zero-Power Electrically Tunable Micromechanical Photoswitches , 2018, IEEE Sensors Journal.

[29]  Inkyu Park,et al.  Half-Pipe Palladium Nanotube-Based Hydrogen Sensor Using a Suspended Nanofiber Scaffold. , 2019, ACS applied materials & interfaces.

[30]  Eric Lebrasseur,et al.  A zero-power sensing MEMS shock sensor with a latch-reset mechanism for multi-threshold events monitoring , 2019 .

[31]  Florin Udrea,et al.  A maskless etching technique for fabrication of 3D MEMS structures in SOI CMOS devices , 2018 .

[32]  Atsushi Isobe,et al.  Capacitive MEMS Accelerometer With Perforated and Electrically Separated Mass Structure for Low Noise and Low Power , 2019, Journal of Microelectromechanical Systems.

[33]  Xi Tian,et al.  Wireless body sensor networks based on metamaterial textiles , 2019, Nature Electronics.

[34]  Qiongfeng Shi,et al.  Self-powered glove-based intuitive interface for diversified control applications in real/cyber space , 2019, Nano Energy.

[35]  David J. Bishop,et al.  Fabrication of multi-material 3D structures by the integration of direct laser writing and MEMS stencil patterning. , 2019, Nanoscale.

[36]  Mourad Benmessaoud,et al.  Optimization of MEMS capacitive accelerometer , 2013 .

[37]  Qiang Chen,et al.  Low-Cost Printed Chipless RFID Humidity Sensor Tag for Intelligent Packaging , 2015, IEEE Sensors Journal.

[38]  Keekeun Lee,et al.  Development of chipless and wireless underground temperature sensor system based on magnetic antennas and SAW sensor , 2019, Sensors and Actuators A: Physical.

[39]  Chengkuo Lee,et al.  Feasibility study of a 3D vibration-driven electromagnetic MEMS energy harvester with multiple vibration modes , 2012 .

[40]  Chengkuo Lee,et al.  Computational Characterization of a Photonic Crystal Cantilever Sensor Using a Hexagonal Dual-Nanoring-Based Channel Drop Filter , 2011, IEEE Transactions on Nanotechnology.

[41]  Alex Elvin,et al.  An experimentally validated electromagnetic energy harvester , 2011 .

[42]  T. Kenny,et al.  A high-performance planar piezoresistive accelerometer , 2000, Journal of Microelectromechanical Systems.

[43]  Zhenan Bao,et al.  Biodegradable and flexible arterial-pulse sensor for the wireless monitoring of blood flow , 2019, Nature Biomedical Engineering.

[44]  R. Mahameed,et al.  Piezoelectric aluminum nitride nanoelectromechanical actuators , 2009 .

[45]  Hengyu Guo,et al.  Human–Machine Interfacing Enabled by Triboelectric Nanogenerators and Tribotronics , 2018, Advanced Materials Technologies.

[46]  Chengkuo Lee,et al.  Advances in MEMS Based Planar VOA , 2007 .

[47]  Honglong Chang,et al.  A Closed-Loop Mode-Localized Accelerometer , 2018, Journal of Microelectromechanical Systems.

[48]  A Crespo-Poveda,et al.  Acoustically driven arrayed waveguide grating. , 2015, Optics express.

[49]  M. Yuce,et al.  Sensors and Control Interface Methods Based on Triboelectric Nanogenerator in IoT Applications , 2019, IEEE Access.

[50]  Seong Kwang Hong,et al.  Flexible Piezoelectric Acoustic Sensors and Machine Learning for Speech Processing , 2019, Advanced materials.

[51]  Mengmeng Liu,et al.  Ultrastretchable, transparent triboelectric nanogenerator as electronic skin for biomechanical energy harvesting and tactile sensing , 2017, Science Advances.

[52]  Shana Smith,et al.  A Tactile Feedback Glove for Reproducing Realistic Surface Roughness and Continual Lateral Stroking Perception , 2018, EuroHaptics.

[53]  Wei-Cheng Lai,et al.  Development of a no-back-plate SOI MEMS condenser microphone , 2015, 2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS).

[54]  Chengkuo Lee,et al.  Development of piezoelectric microcantilever flow sensor with wind-driven energy harvesting capability , 2012 .

[55]  Milind Pandit,et al.  Ultra-fine Particulate Detection using Mode-localized MEMS Resonators , 2019, 2019 Joint Conference of the IEEE International Frequency Control Symposium and European Frequency and Time Forum (EFTF/IFC).

[56]  Gwiy-Sang Chung,et al.  A novel flexible acetylene gas sensor based on PI/PTFE-supported Ag-loaded vertical ZnO nanorods array , 2016 .

[57]  Seong Kwang Hong,et al.  Machine learning-based self-powered acoustic sensor for speaker recognition , 2018, Nano Energy.

[58]  Chengkuo Lee,et al.  Theoretical comparison of the energy harvesting capability among various electrostatic mechanisms from structure aspect , 2009 .

[59]  Chengkuo Lee,et al.  Active Multifunctional Microelectromechanical System Metadevices: Applications in Polarization Control, Wavefront Deflection, and Holograms , 2017 .

[60]  Chengkuo Lee,et al.  Triboelectric Self-Powered Wearable Flexible Patch as 3D Motion Control Interface for Robotic Manipulator. , 2018, ACS nano.

[61]  Jung Woo Lee,et al.  Battery-free, wireless sensors for full-body pressure and temperature mapping , 2018, Science Translational Medicine.

[62]  V. Ferrari,et al.  Thermal energy harvesting through pyroelectricity , 2010 .

[63]  Chengkuo Lee,et al.  A dual-silicon-nanowires based U-shape nanoelectromechanical switch with low pull-in voltage , 2012 .

[64]  Asif Ishfaque,et al.  Fly Ormia Ochracea Inspired MEMS Directional Microphone: A Review , 2018, IEEE Sensors Journal.

[65]  Sungho Kang,et al.  Zero-power infrared digitizers based on plasmonically enhanced micromechanical photoswitches. , 2017, Nature nanotechnology.

[66]  M. Leidinger,et al.  Integrated pre-concentrator gas sensor microsystem for ppb level benzene detection , 2016 .

[67]  Qiongfeng Shi,et al.  Battery-free neuromodulator for peripheral nerve direct stimulation , 2018, Nano Energy.

[68]  Brendan Michael,et al.  Activity recognition with wearable sensors on loose clothing , 2017, PloS one.

[69]  Chengkuo Lee,et al.  Piezoelectric MEMS Energy Harvester for Low-Frequency Vibrations With Wideband Operation Range and Steadily Increased Output Power , 2011, Journal of Microelectromechanical Systems.

[70]  Qiongfeng Shi,et al.  MEMS Based Broadband Piezoelectric Ultrasonic Energy Harvester (PUEH) for Enabling Self-Powered Implantable Biomedical Devices , 2016, Scientific Reports.

[71]  Vladimir Leonov,et al.  Thermoelectric energy harvester on the heated human machine , 2011 .

[72]  Chao-Ming Chen,et al.  Study of novel electrical routing and integrated packaging on bio-compatible flexible substrates , 2009 .

[73]  Qiongfeng Shi,et al.  Controlling Surface Charge Generated by Contact Electrification: Strategies and Applications , 2018, Advanced materials.

[74]  Gautam Srivastava,et al.  A Node Density Control Learning Method for the Internet of Things , 2019, Sensors.

[75]  Faisal Mohd-Yasin,et al.  The fabrication of back etching 3C-SiC-on-Si diaphragm employing KOH + IPA in MEMS capacitive pressure sensor , 2015 .

[76]  Ashiqur Rahaman,et al.  Bioinspired low noise circular-shaped MEMS directional microphone , 2019, Journal of Micro/Nanolithography, MEMS, and MOEMS.

[77]  N. Sinha,et al.  Body-Biased Complementary Logic Implemented Using AlN Piezoelectric MEMS Switches , 2009, Journal of Microelectromechanical Systems.

[78]  Chengkuo Lee,et al.  Design, Fabrication, and Characterization of CMOS MEMS-Based Thermoelectric Power Generators , 2010, Journal of Microelectromechanical Systems.

[79]  Chengkuo Lee,et al.  Novel piezoelectric actuation mechanism for a gimbal-less mirror in 2D raster scanning applications , 2011 .

[80]  Qiongfeng Shi,et al.  Self‐Powered Bio‐Inspired Spider‐Net‐Coding Interface Using Single‐Electrode Triboelectric Nanogenerator , 2019, Advanced science.

[81]  Paul R. Hartmann.  A passive SAW based RFID system for use on ordnance , 2009, 2009 IEEE International Conference on RFID.

[82]  D. Kwon,et al.  High-Sensitivity and Low-Power Flexible Schottky Hydrogen Sensor Based on Silicon Nanomembrane. , 2018, ACS applied materials & interfaces.

[83]  Deepak Uttamchandani,et al.  A Low-Frequency Dual-Band Operational Microphone Mimicking the Hearing Property of Ormia Ochracea , 2018, Journal of Microelectromechanical Systems.

[84]  Muhammad Ali Shah,et al.  Design Approaches of MEMS Microphones for Enhanced Performance , 2019, J. Sensors.

[85]  Chengkuo Lee,et al.  A MEMS rotary comb mechanism for harvesting the kinetic energy of planar vibrations , 2010 .

[86]  Tadahiko Shinshi,et al.  ELECTROMAGNETIC-FORCE-DRIVING TYPE MEMS SWITCH USING HIGH PERFORMANCE NdFeB / Ta THIN FILM PERMANENT MAGNET , 2010 .

[87]  Guofeng Chen,et al.  Design and fabrication of AlN RF MEMS switch for near-zero power RF wake-up receivers , 2017, 2017 IEEE SENSORS.

[88]  Carles Cané,et al.  Chemoresistive gas sensor based on ZIF-8/ZIF-67 nanocrystals , 2018, Sensors and Actuators B: Chemical.

[89]  Chengkuo Lee,et al.  Investigation of piezoelectric driven MEMS mirrors based on single and double S-shaped PZT actuator for 2-D scanning applications , 2012 .

[90]  Chengkuo Lee,et al.  Ultra-wide frequency broadening mechanism for micro-scale electromagnetic energy harvester , 2014 .

[91]  Inkyu Park,et al.  Localized Liquid-Phase Synthesis of Porous SnO2 Nanotubes on MEMS Platform for Low-Power, High Performance Gas Sensors. , 2017, ACS applied materials & interfaces.

[92]  K. Najafi,et al.  A monolithic three-axis micro-g micromachined silicon capacitive accelerometer , 2005, Journal of Microelectromechanical Systems.

[93]  Chengkuo Lee,et al.  Hybrid Metamaterial Absorber Platform for Sensing of CO2 Gas at Mid‐IR , 2018, Advanced science.

[94]  Chengkuo Lee,et al.  Design evaluation of graphene nanoribbon nanoelectromechanical devices , 2011 .

[95]  Balthasar Fischer,et al.  Optical microphone hears ultrasound , 2016, Nature Photonics.

[96]  Hengyu Guo,et al.  Triboelectric Nanogenerator: A Foundation of the Energy for the New Era , 2018, Advanced Energy Materials.

[97]  Lei Jin,et al.  Direct Powering a Real Cardiac Pacemaker by Natural Energy of a Heartbeat. , 2019, ACS nano.

[98]  Nguyen Duc Hoa,et al.  Excellent detection of H2S gas at ppb concentrations using ZnFe2O4 nanofibers loaded with reduced graphene oxide , 2019, Sensors and Actuators B: Chemical.

[99]  Chengkuo Lee,et al.  A Bistable Silicon Nanofin: An Ideal Device for Nonvolatile Memory Applications , 2013, IEEE Nanotechnology Magazine.

[100]  Mahmoud Almasri,et al.  Dynamic phenomena and analysis of MEMS capacitive power harvester subjected to low-frequency excitations , 2015 .

[101]  V. Plessky,et al.  Review on SAW RFID tags , 2009, IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control.

[102]  Chengkuo Lee,et al.  A 1-V Operated MEMS Variable Optical Attenuator Using Piezoelectric PZT Thin-Film Actuators , 2009, IEEE Journal of Selected Topics in Quantum Electronics.

[103]  G E O'Donnell,et al.  Wireless Calibration of a Surface Acoustic Wave Resonator as a Strain Sensor , 2011, IEEE Sensors Journal.

[104]  Di Chen,et al.  A MEMS-based piezoelectric power generator array for vibration energy harvesting , 2008, Microelectron. J..

[105]  Tiago M. Fernández-Caramés,et al.  Towards The Internet-of-Smart-Clothing: A Review on IoT Wearables and Garments for Creating Intelligent Connected E-Textiles , 2018, Electronics.

[106]  Stéphanie P. Lacour,et al.  Gallium‐Based Thin Films for Wearable Human Motion Sensors , 2019, Adv. Intell. Syst..

[107]  Lihong Zhang,et al.  Portable Wind Energy Harvesters for Low-Power Applications: A Survey , 2016, Sensors.

[108]  G. Whitesides,et al.  Soft lithography for micro- and nanoscale patterning , 2010, Nature Protocols.

[109]  Chengkuo Lee,et al.  Investigation of Position Sensing and Energy Harvesting of a Flexible Triboelectric Touch Pad , 2018, Nanomaterials.

[110]  Igor Nevlydov,et al.  MEMS-Based Inertial Sensor Signals and Machine Learning Methods for Classifying Robot Motion , 2018, 2018 IEEE Second International Conference on Data Stream Mining & Processing (DSMP).

[111]  J. F. C. Windmill,et al.  Development of a biologically inspired MEMS microphone , 2017, 2017 IEEE SENSORS.

[112]  Chengkuo Lee,et al.  Characterization of heavily doped polysilicon films for CMOS-MEMS thermoelectric power generators , 2009 .

[113]  Michael L. Kuntzman,et al.  Piezoelectric micromachined microphones with out-of-plane directivity , 2013 .

[114]  Bernhard Wagner,et al.  Low temperature transient liquid phase bonding of Au/Sn and Cu/Sn electroplated material systems for MEMS wafer-level packaging , 2012, Microsystem Technologies.

[115]  Hubert Roth,et al.  Origins and Mechanisms of Bias Instability Noise in a Three-Axis Mode-Matched MEMS Gyroscope , 2019, Journal of Microelectromechanical Systems.

[116]  Chia-Chun Chen,et al.  Unity game engine: interactive software design using digital glove for virtual reality baseball pitch training , 2019 .

[117]  Zhen Wu,et al.  A Wireless and Passive Online Temperature Monitoring System for GIS Based on Surface-Acoustic-Wave Sensor , 2016, IEEE Transactions on Power Delivery.

[118]  Fei Wang,et al.  Micro electrostatic energy harvester with both broad bandwidth and high normalized power density , 2018 .

[119]  E. S. Kim,et al.  Single- and Triaxis Piezoelectric-Bimorph Accelerometers , 2008, Journal of Microelectromechanical Systems.

[120]  Chengkuo Lee,et al.  Piezoelectric MEMS-based wideband energy harvesting systems using a frequency-up-conversion cantilever stopper , 2012 .

[121]  Qiongfeng Shi,et al.  More than energy harvesting – Combining triboelectric nanogenerator and flexible electronics technology for enabling novel micro-/nano-systems , 2019, Nano Energy.

[122]  Jae Eun Jang,et al.  Nanoscale memory cell based on a nanoelectromechanical switched capacitor. , 2008, Nature nanotechnology.

[123]  Weileun Fang,et al.  A Three-Axis CMOS-MEMS Accelerometer Structure With Vertically Integrated Fully Differential Sensing Electrodes , 2012, Journal of Microelectromechanical Systems.

[124]  Jianxiong Zhu,et al.  Suspended polytetrafluoroethylene nanostructure electret film in dual variable cavities for self-powered micro-shock sensing , 2018 .

[125]  Mauro Serpelloni,et al.  An efficient electromagnetic power harvesting device for low-frequency applications , 2011 .

[126]  Julian W. Gardner,et al.  Ultrasensitive WO3 gas sensors for NO2 detection in air and low oxygen environment , 2017 .

[127]  Qifa Zhou,et al.  Monitoring of the central blood pressure waveform via a conformal ultrasonic device , 2018, Nature Biomedical Engineering.

[128]  Thomas R. Shrout,et al.  Piezoelectric accelerometers for ultrahigh temperature application , 2010 .

[129]  Andrei M. Shkel,et al.  MEMS Gyroscope With Concentrated Springs Suspensions Demonstrating Single Digit Frequency Split and Temperature Robustness , 2019, Journal of Microelectromechanical Systems.

[130]  Dzung Viet Dao,et al.  Development of miniaturized 6-axis accelerometer utilizing piezoresistive sensing elements , 2007 .

[131]  Lihong Zhang,et al.  Design and Optimization of a Low-Resonant-Frequency Piezoelectric MEMS Energy Harvester Based on Artificial Intelligence , 2018, Proceedings.

[132]  Alberto Corigliano,et al.  Self-induced parametric amplification arising from nonlinear elastic coupling in a micromechanical resonating disk gyroscope , 2015, Scientific Reports.

[133]  マイクロメカトロニクス実装技術委員会.  Progress in Wafer Level MEMS Packaging , 2007 .

[134]  Chengkuo Lee,et al.  Characterization of Silicon Nanowire Embedded in a MEMS Diaphragm Structure Within Large Compressive Strain Range , 2011, IEEE Electron Device Letters.

[135]  Chengkuo Lee,et al.  A MEMS-based piezoelectric cantilever patterned with PZT thin film array for harvesting energy from low frequency vibrations , 2011 .

[136]  Thomas W. Kenny,et al.  Micro-Tethering for Fabrication of Encapsulated Inertial Sensors With High Sensitivity , 2019, Journal of Microelectromechanical Systems.

[137]  Zhuangde Jiang,et al.  A low noise capacitive MEMS accelerometer with anti-spring structure , 2019, Sensors and Actuators A: Physical.

[138]  Qiongfeng Shi,et al.  Minimalist and multi-functional human machine interface (HMI) using a flexible wearable triboelectric patch , 2019, Nano Energy.

[139]  Alperen Toprak,et al.  MEMS Scale PVDF-TrFE-Based Piezoelectric Energy Harvesters , 2015, Journal of Microelectromechanical Systems.

[140]  Chengkuo Lee,et al.  Self-Powered and Self-Functional Cotton Sock Using Piezoelectric and Triboelectric Hybrid Mechanism for Healthcare and Sports Monitoring. , 2019, ACS nano.

[141]  Donghwan Kim,et al.  Micromachined In-Plane Pressure-Gradient Piezoelectric Microphones , 2015, IEEE Sensors Journal.

[142]  Chengkuo Lee,et al.  Design and Modeling of a Nanomechanical Sensor Using Silicon Photonic Crystals , 2008, Journal of Lightwave Technology.

[143]  Erwin Peiner,et al.  Fabrication of a microcantilever-based aerosol detector with integrated electrostatic on-chip ultrafine particle separation and collection , 2019, Journal of Micromechanics and Microengineering.

[144]  Daigo Miki,et al.  A MEMS electret generator with electrostatic levitation for vibration-driven energy-harvesting applications , 2010 .

[145]  Domenico Accardo,et al.  MEMS gyros temperature calibration through artificial neural networks , 2018, Sensors and Actuators A: Physical.

[146]  Bowen Ji,et al.  A novel assembly method for 3-dimensional microelectrode array with micro-drive , 2018, Sensors and Actuators B: Chemical.

[147]  Chengkuo Lee,et al.  Micromachined piezoelectric ultrasonic transducer with ultra-wide frequency bandwidth , 2015 .

[148]  Haibing Hu,et al.  Hybrid Electromagnetic and Triboelectric Nanogenerators with Multi-Impact for Wideband Frequency Energy Harvesting , 2017 .

[149]  Elena Blokhina,et al.  A batch-fabricated electret-biased wideband MEMS vibration energy harvester with frequency-up conversion behavior powering a UHF wireless sensor node , 2016 .

[150]  Inkyu Park,et al.  Fully integrated and portable semiconductor-type multi-gas sensing module for IoT applications , 2018, Sensors and Actuators B: Chemical.

[151]  Tayfun Akin,et al.  A Method of Fabricating Vacuum Packages with Vertical Feedthroughs in a Wafer Level Anodic Bonding Process , 2014 .

[152]  Sangkyung Sung,et al.  Development of a lateral velocity-controlled MEMS vibratory gyroscope and its performance test , 2008 .

[153]  Zhong Lin Wang,et al.  Eye motion triggered self-powered mechnosensational communication system using triboelectric nanogenerator , 2017, Science Advances.

[154]  Nitish V. Thakor,et al.  Investigation of Low‐Current Direct Stimulation for Rehabilitation Treatment Related to Muscle Function Loss Using Self‐Powered TENG System , 2019, Advanced science.

[155]  Inkyu Park,et al.  Palladium-Decorated Silicon Nanomesh Fabricated by Nanosphere Lithography for High Performance, Room Temperature Hydrogen Sensing. , 2018, Small.

[156]  Erwin Peiner,et al.  Piezoresistive Microcantilevers 3D-Patterned Using Zno-Nanorods@Silicon-Nanopillars for Room-Temperature Ethanol Detection , 2019, 2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems & Eurosensors XXXIII (TRANSDUCERS & EUROSENSORS XXXIII).

[157]  Jayoung Kim,et al.  Simultaneous Monitoring of Sweat and Interstitial Fluid Using a Single Wearable Biosensor Platform , 2018, Advanced science.

[158]  Chengkuo Lee,et al.  Sol-gel derived PZT force sensor for scanning force microscopy , 1996 .

[159]  Chunkai Qiu,et al.  Triboelectric single-electrode-output control interface using patterned grid electrode , 2019, Nano Energy.

[160]  Qiongfeng Shi,et al.  Self‐Sustainable Wearable Textile Nano‐Energy Nano‐System (NENS) for Next‐Generation Healthcare Applications , 2019, Advanced science.

[161]  Inkyu Park,et al.  Half-Pipe Palladium Nanotube Network Hydrogen Sensor Based on Electrospun Nanofiber Scaffolds , 2019, 2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems & Eurosensors XXXIII (TRANSDUCERS & EUROSENSORS XXXIII).

[162]  Thomas W. Kenny,et al.  Environmentally robust differential resonant accelerometer in a wafer-scale encapsulation process , 2017, 2017 IEEE 30th International Conference on Micro Electro Mechanical Systems (MEMS).

[163]  Chengkuo Lee,et al.  Seal and encapsulate cavities for complementary metal-oxide-semiconductor microelectromechanical system thermoelectric power generators , 2011 .

[164]  Mohammad I. Younis,et al.  Nonlinear-Based MEMS Sensors and Active Switches for Gas Detection , 2016, Sensors.

[165]  Chengkuo Lee,et al.  Characterization of intermediate In/Ag layers of low temperature fluxless solder based wafer bonding for MEMS packaging , 2009 .

[166]  Tianyiyi He,et al.  Direct muscle stimulation using diode-amplified triboelectric nanogenerators (TENGs) , 2019, Nano Energy.

[167]  Qiongfeng Shi,et al.  Broadband Energy Harvester Using Non-linear Polymer Spring and Electromagnetic/Triboelectric Hybrid Mechanism , 2017, Scientific Reports.

[168]  Chengkuo Lee,et al.  Analytical solutions of sensitivity for pressure microsensors , 2001 .

[169]  Chengkuo Lee,et al.  Microstructures for characterization of seebeck coefficient of doped polysilicon films , 2011 .

[170]  D. Kwong,et al.  Annularly Grooved Diaphragm Pressure Sensor With Embedded Silicon Nanowires for Low Pressure Application , 2014, Journal of Microelectromechanical Systems.

[171]  J. Andrew Yeh,et al.  Development and evolution of MOEMS technology in variable optical attenuators , 2008 .

[172]  Pengcheng Xu,et al.  In situ construction of metal-organic framework (MOF) UiO-66 film on Parylene-patterned resonant microcantilever for trace organophosphorus molecules detection. , 2019, The Analyst.

[173]  Yunjiang Rao,et al.  A Highly Sensitive Fiber-Optic Microphone Based on Graphene Oxide Membrane , 2017, Journal of Lightwave Technology.

[174]  Fengtian Han,et al.  Temperature-Insensitive Structure Design of Micromachined Resonant Accelerometers , 2019, Sensors.

[175]  Chengkuo Lee,et al.  Experimental Investigation of a Cavity-Mode Resonator Using a Micromachined Two-Dimensional Silicon Phononic Crystal in a Square Lattice , 2011, IEEE Electron Device Letters.

[176]  Babak Fahimi,et al.  Low-Cost Drive for Switched Reluctance Machine Using Piezoelectric Actuators , 2019, IEEE Journal of Emerging and Selected Topics in Power Electronics.

[177]  Tian-Ling Ren,et al.  Biomimetic Turbinate-like Artificial Nose for Hydrogen Detection Based on 3D Porous Laser-induced Graphene. , 2019, ACS applied materials & interfaces.

[178]  Chengkuo Lee,et al.  Non-resonant electromagnetic wideband energy harvesting mechanism for low frequency vibrations , 2010 .

[179]  Yang Zou,et al.  Symbiotic cardiac pacemaker , 2019, Nature Communications.

[180]  Chengkuo Lee,et al.  Active MEMS metamaterials for THz bandwidth control , 2017 .

[181]  Yongtian Wang,et al.  Hetero-contact microstructure to program discerning tactile interactions for virtual reality , 2019, Nano Energy.

[182]  Songlin Feng,et al.  High-performance monolithic triaxial piezoresistive shock accelerometers , 2008 .

[183]  Chengkuo Lee,et al.  A Piezoelectric-Driven Three-Dimensional MEMS VOA Using Attenuation Mechanism With Combination of Rotational and Translational Effects , 2010, Journal of Microelectromechanical Systems.

[184]  Suraj Kumar,et al.  Baseline Drift Improvement Through Investigating a Novel Ag Doped SnO2/ZnO Nanocomposite for Selective Ethanol Detection , 2019, IEEE Transactions on Nanotechnology.

[185]  Qiongfeng Shi,et al.  Beyond energy harvesting - multi-functional triboelectric nanosensors on a textile , 2019, Nano Energy.

[186]  Josh Javor,et al.  Building a Casimir metrology platform with a commercial MEMS sensor , 2019, Microsystems & Nanoengineering.

[187]  Fanli Meng,et al.  Synthesis of Au Nanoparticle-Modified Spindle Shaped α-Fe2O3 Nanorods and Their Gas Sensing Properties to N-Butanol , 2019, IEEE Transactions on Nanotechnology.

[188]  Franz Keplinger,et al.  Highly Efficient Passive Thermal Micro-Actuator , 2015, Journal of Microelectromechanical Systems.

[189]  Dunzhu Xia,et al.  Structural Analysis of Disk Resonance Gyroscope , 2017, Micromachines.

[190]  Chengkuo Lee,et al.  Study of electrothermal V-beam actuators and latched mechanism for optical switch , 2005 .

[191]  Ke Chen,et al.  Fast demodulated white-light interferometry-based fiber-optic Fabry-Perot cantilever microphone. , 2018, Optics letters.

[192]  Asif Abdullah Khan,et al.  Evolution From Single to Hybrid Nanogenerator: A Contemporary Review on Multimode Energy Harvesting for Self-Powered Electronics , 2019, IEEE Transactions on Nanotechnology.

[193]  Qiongfeng Shi,et al.  Intuitive-augmented human-machine multidimensional nano-manipulation terminal using triboelectric stretchable strip sensors based on minimalist design , 2019, Nano Energy.

[194]  Rui Wang,et al.  The affordance of virtual reality to enable the sensory representation of multi-dimensional data for immersive analytics: from experience to insight , 2018, Journal of Big Data.

[195]  S. De Vito,et al.  Dynamic neural network architectures for on field stochastic calibration of indicative low cost air quality sensing systems , 2016 .

[196]  Chengkuo Lee,et al.  Investigation of geometric design in piezoelectric microelectromechanical systems diaphragms for ultrasonic energy harvesting , 2016 .

[197]  Euisik Yoon,et al.  Design and fabrication of a single membrane push-pull SPDT RF MEMS switch operated by electromagnetic actuation and electrostatic hold , 2010 .

[198]  Mo Li,et al.  Sub-optical wavelength acoustic wave modulation of integrated photonic resonators at microwave frequencies. , 2014, Nature communications.

[199]  Lining Sun,et al.  Novel augmented reality interface using a self-powered triboelectric based virtual reality 3D-control sensor , 2018, Nano Energy.

[200]  X. Shan,et al.  Large Scale Triboelectric Nanogenerator and Self-Powered Pressure Sensor Array Using Low Cost Roll-to-Roll UV Embossing , 2016, Scientific Reports.

[201]  Gabriel M. Rebeiz,et al.  RF MEMS switches and switch circuits , 2001 .