论文信息 - Modeling and Simulation of Piezoelectric MEMS Sensor

Modeling and Simulation of Piezoelectric MEMS Sensor

MEMS Accelerometers are the new inventions which revolutionized the technical world. In this paper, we have designed the trampoline, annular diaphragm structured piezoelectric accelerometers using PZT-5H with COMSOL Multiphysics computational tool for providing low transverse sensitivity along one axis and good temperature stability. These accelerometers are incorporated into application specific integration circuit (ASIC) and RF telemetry systems to facilitate wireless monitoring of industrial equipment.

K. Srinivasa Rao | G. Venkateswara Rao | G. Yugandhar

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