Performance and flow analysis of small piezo pump

Abstract This study analyzed the characteristics of a small reciprocating pump with a reed valve driven by a piezo actuator. Two types of valves were fabricated and the effect of valve shape on the pump performance was investigated. The flow rate variation with the frequency was measured. The flow rate increased with the driving frequency until a certain frequency then started decreasing. There was a change in the flow rate increase at the resonance frequency of the piston membrane. Pressure fluctuations generated by pump operation play a significant role in determining the flow pattern. In particular, the valve stiffness and fluid inertia were found to be the major parameters for pressure waveform. The flow pattern of the outlet valve port was analyzed using the visualization technique. The flow pattern changed depending on the shape of the valve and driving waveform. The arm valve produced higher flow velocity than that of the cantilever valve. The flow behavior inside the valve port provided the comprehensive relationship to the effect of the valve shape on the pump performance.

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