A model for fast oxide thickness and surface concentration extraction for tunnel oxide capacitors

This paper describes a model for extraction of oxide thickness and surface concentrations from HF-CV measurements. The accuracy of the model is evaluated by comparing the obtained results with values calculated by solving the Poisson and Gauss equations for a capacitor. It is shown that the model is suited for accurate extractions for layers with concentration between 1.1019 and 1.1020 cm-3.