Simultaneous formation of titanium nitride and titanium silicide in a one-step process in heterogeneous phase during multipulse laser treatment of a Si wafer with a thin Ti coating in superatmospheric N2

[1]  M. Popescu,et al.  Direct carbide synthesis by multipulse excimer laser treatment of Ti samples in ambient CH4 gas at superatmospheric pressure , 1994 .

[2]  I. Ursu,et al.  Deposition of high quality TiN films by excimer laser ablation in reactive gas , 1993 .

[3]  N. Chitica,et al.  Evidence of refractive index change by Ti indiffusion into LiNbO3 substrate as a result of multipulse free‐running ruby laser irradiation , 1993 .

[4]  A. Luches,et al.  Synthesis of thin films of semiconductor and refractory metal nitrides by laser irradiation of solid samples in ambient gases , 1992 .

[5]  A. Luches,et al.  Laser synthesis of thin films of metal silicides , 1992 .

[6]  I. Mihailescu,et al.  Synthesis of pure titanium nitride layers by multipulse excimer laser irradiation of titanium foils in a nitrogen‐containing atmosphere , 1991 .

[7]  I. Mihailescu,et al.  Direct oxinitride synthesis by multipulse excimer laser irradiation of silicon wafers in a nitrogen‐containing ambient environment , 1990 .

[8]  I. Ursu,et al.  Multilayer metallization structures with titanium nitride and titanium silicide prepared by multipulse laser irradiation , 1988 .

[9]  D. Poulin,et al.  Formation of self‐aligned TiSi2 for very large scale integrated contacts and interconnects , 1987 .

[10]  A. Rockett,et al.  Microstructural and microchemical characterization of hard coatings , 1986 .

[11]  A. Scorzoni,et al.  Ion‐implanted, electron‐beam annealed TiN films as diffusion barriers for Al on Si shallow junctions , 1985 .

[12]  K. Y. Ahn,et al.  Formation of TiSi2 and TiN during nitrogen annealing of magnetron sputtered Ti films , 1985 .

[13]  J. Sundgren,et al.  Structure and properties of TiN coatings , 1985 .

[14]  W. Funk,et al.  Bond strength optimization of plasma-sprayed Cr2O3 layers by factorial two-level experiments , 1985 .

[15]  Shyam P Murarka,et al.  Silicides for VLSI Applications , 1983 .

[16]  G. Ottaviani.  Review of binary alloy formation by thin film interactions , 1979 .