Simultaneous formation of titanium nitride and titanium silicide in a one-step process in heterogeneous phase during multipulse laser treatment of a Si wafer with a thin Ti coating in superatmospheric N2
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N. Chitica | I. Mihailescu | A. Luches | A. Lita | P. Mengucci | V. Teodorescu | M. Martino | G. Majni | G. Leggieri
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