The structure of a water film formed on mica at room temperature, in equilibrium with water vapor at various relative humidities (RH), was studied using sum-frequency-generation (SFG) vibrational spectroscopy and scanning polarization force microscopy (SPFM). Analysis of the O-D stretch modes in the SFG spectra of D{sub 2}O on mica indicates that as RH increases, the submonolayer water structure evolves into a more ordered hydrogen-bonding network. At full monolayer coverage ({approximately} 90{percent} RH) , the SFG spectrum suggests an icelike film with no dangling O-D groups, in agreement with a recent molecular dynamics simulation. {copyright} {ital 1998} {ital The American Physical Society}