论文信息 - Low power density multihole cathode very-high-frequency plasma for mixed phase Si:H thin films - 字舞流文

Low power density multihole cathode very-high-frequency plasma for mixed phase Si:H thin films

P. I. John | Shik Shin | V. Dalal | C. Jariwala | A. Chainani | R. Eguchi | M. Matsunami | S. Bhatt