Realization of wafer-scale nanogratings with sub-50 nm period through vacancy epitaxy

[1]  I. Buyanova,et al.  Room-temperature polarized spin-photon interface based on a semiconductor nanodisk-in-nanopillar structure driven by few defects , 2018, Nature Communications.

[2]  T. You,et al.  Ultra-dense planar metallic nanowire arrays with extremely large anisotropic optical and magnetic properties , 2018, Nano Research.

[3]  Raymond E. Conley,et al.  Gratings for synchrotron and FEL beamlines: a project for the manufacture of ultra-precise gratings at Helmholtz Zentrum Berlin , 2018, Journal of synchrotron radiation.

[4]  P. Nealey,et al.  Sub-10-nm patterning via directed self-assembly of block copolymer films with a vapour-phase deposited topcoat. , 2017, Nature nanotechnology.

[5]  F. Bijkerk,et al.  Spectral tailoring of nanoscale EUV and soft x-ray multilayer optics , 2017 .

[6]  David Garzella,et al.  Chirped pulse amplification in an extreme-ultraviolet free-electron laser , 2016, Nature Communications.

[7]  Joseph Dvorak,et al.  Towards 10 meV resolution: The design of an ultrahigh resolution soft X-ray RIXS spectrometer. , 2016, The Review of scientific instruments.

[8]  Dirk Englund,et al.  Scalable focused ion beam creation of nearly lifetime-limited single quantum emitters in diamond nanostructures , 2016, Nature Communications.

[9]  Zhanshan Wang,et al.  Wideband multilayer gratings for the 17-25 nm spectral region. , 2016, Optics express.

[10]  J. M. Sturm,et al.  Highly efficient blazed grating with multilayer coating for tender X-ray energies. , 2016, Optics express.

[11]  Xiuling Li,et al.  Enhanced Optical Transmission through MacEtch‐Fabricated Buried Metal Gratings , 2016, Advanced materials.

[12]  C. David,et al.  A beam branching method for timing and spectral characterization of hard X-ray free-electron lasers , 2016, Structural dynamics.

[13]  R. Byer,et al.  Optical gating and streaking of free electrons with sub-optical cycle precision , 2015, Nature Communications.

[14]  M. Helm,et al.  Faceted nanostructure arrays with extreme regularity by self-assembly of vacancies. , 2015, Nanoscale.

[15]  Zhanshan Wang,et al.  High reflectance Cr/C multilayer at 250eV for soft X-ray polarimetry , 2015 .

[16]  Xiuling Li,et al.  High-Speed Planar GaAs Nanowire Arrays with fmax > 75 GHz by Wafer-Scale Bottom-up Growth. , 2015, Nano letters.

[17]  Qiushi Huang,et al.  Unified analytical theory of single-order soft x-ray multilayer gratings , 2015 .

[18]  H. Wen,et al.  Fabrication of 200 nm Period Hard X-ray Phase Gratings , 2014, Nano letters.

[19]  Valeriy V. Yashchuk,et al.  Control of surface mobility for conformal deposition of Mo–Si multilayers on saw-tooth substrates , 2013 .

[20]  M. Helm,et al.  Reverse epitaxy of Ge: ordered and faceted surface patterns. , 2013, Physical review letters.

[21]  Saša Bajt,et al.  High-efficiency x-ray gratings with asymmetric-cut multilayers. , 2012, Journal of the Optical Society of America. A, Optics, image science, and vision.

[22]  H. Chapman,et al.  Moving the Frontier of Quantum Control into the Soft X-Ray Spectrum , 2011 .

[23]  M. Allegrini,et al.  Re-radiation enhancement in polarized surface-enhanced resonant Raman scattering of randomly oriented molecules on self-organized gold nanowires. , 2011, ACS nano.

[24]  D. L. Voronov,et al.  A 10,000 groove/mm multilayer coated grating for EUV spectroscopy. , 2011, Optics express.

[25]  Jeroen van den Brink,et al.  Resonant Inelastic X-ray Scattering Studies of Elementary Excitations , 2010, 1009.3630.

[26]  D. L. Voronov,et al.  High-efficiency 5000 lines/mm multilayer-coated blazed grating for extreme ultraviolet wavelengths. , 2010, Optics letters.

[27]  A. Piazzalunga,et al.  Synchrotron Radiation High-resolution Soft X-ray Beamline Adress at the Swiss Light Source for Resonant Inelastic X-ray Scattering and Angle-resolved Photoelectron Spectroscopies , 2022 .

[28]  Ying Wang,et al.  Self-formation of sub-60-nm half-pitch gratings with large areas through fracturing. , 2007, Nature nanotechnology.

[29]  K. Kern,et al.  Engineering atomic and molecular nanostructures at surfaces , 2005, Nature.

[30]  P. Nealey,et al.  Epitaxial self-assembly of block copolymers on lithographically defined nanopatterned substrates , 2003, Nature.

[31]  Shinji Okazaki,et al.  Pushing the limits of lithography , 2000, Nature.

[32]  Kurz,et al.  Formation of Ordered Nanoscale Semiconductor Dots by Ion Sputtering. , 1999, Science.

[33]  Maria R. D'Orsogna,et al.  The Kink Ehrlich-Schwoebel Effect and Resulting Instabilities , 1999 .

[34]  Sakurai,et al.  Structures of As-rich GaAs(001)-(2 x 4) reconstructions. , 1994, Physical review letters.

[35]  R. M. Bradley,et al.  Theory of ripple topography induced by ion bombardment , 1988 .

[36]  S. Chou,et al.  Nanoimprint Lithography , 2010 .