Study of Silicon Nitride Inner Spacer Formation in Process of Gate-all-around Nano-Transistors
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Jianfeng Gao | A. Du | Guilei Wang | Jun Luo | Junfeng Li | H. Yin | Huilong Zhu | H. Radamson | Tao Yang | Wenwu Wang | Z. Kong | Hongxiao Lin | Jianghao Han | Junjie Li | Qingzhu Zhang | Xiaolei Wang | J. Xiang | Hong Yang | N. Zhou | Yongliang Li | Xueli Ma | Xiaogen Yin | Chen Li | Wenjuan Xiong | Jing Zhang | Tairan Hu | Zhenwei Cao | W. Xiong | Junjie Li