论文信息 - Improved phase-detection method using an air-coupled ultrasonic wave for a few-tens of nanometers displacement measurements

Improved phase-detection method using an air-coupled ultrasonic wave for a few-tens of nanometers displacement measurements

To enhance the phase sensitivity of ultrasonic signals, phases of the multi-reference-wave are arranged around the maximum phase-sensitive region. The resolution of the phase detection is improved by magnifying the maximum sensitive phase detection outputs. A resolution of 40nm displacement (λ/200, 000) using 40kHz air-coupled ultrasonic waves has been achieved.

Kazuhiko Imano | Katsuhiro Sasaki | Morimasa Nishihira

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