Research on Kinematics of a Novel Micromanipulator with Flexure Hinges

A three degree of freedom parallel micromanipulator is presented.The DOF of parallel manipulator is analyzed by the screw theory and the driven number is obtained.The kinematics solutions are analyzed using the vector theory,as a result,the Velocity of a movable platform is derived.Based on Jacobian matrix,the forward and inverse kinematic singular configuration of the parallel micromanipulator is also studied.The results show that sensitivity parameters existed in Jacobian matrix affect the relation between the input and the output of the micromanipulator,the vector space method is simple and convenient in analyzing the singularity of parallel mechanisms.