Silicon nanowires with controlled sidewall profile and roughness fabricated by thin-film dewetting and metal-assisted chemical etching
暂无分享,去创建一个
N. Fang | P. Ferreira | J. Kim | J. Eraker | S. Sinha | J. Sadhu | Jun Ma | B. Azeredo | K. Hsu | P. Ferreira | N Fang | Jyothi S Sadhu | B P Azeredo | J Sadhu | J Ma | K Jacobs | J Kim | K Lee | J H Eraker | X Li | S Sinha | P Ferreira | K Hsu | J. Ma | K. Jacobs | K. Lee | K. Jacobs | X. Li | JunHwan Kim | Bruno Azeredo | Xiuling Li | Nick Fang
[1] Che-Chen Chang,et al. Spectroscopic characterization of Ni films on sub-10-nm silica layers: Thermal metamorphosis and chemical bonding , 2007 .
[2] Ning-Bew Wong,et al. Ordered silicon nanowire arrays via nanosphere lithography and metal-induced etching , 2007 .
[3] John A Rogers,et al. Porosity control in metal-assisted chemical etching of degenerately doped silicon nanowires , 2012, Nanotechnology.
[4] Michael L. Simpson,et al. Controlling thin film structure for the dewetting of catalyst nanoparticle arrays for subsequent carbon nanofiber growth , 2007 .
[5] Wai Kin Chim,et al. Shape and Size Control of Regularly Arrayed Nanodots Fabricated Using Ultrathin Alumina Masks , 2005 .
[6] P. Schmid,et al. Optical absorption in heavily doped silicon , 1981 .
[7] S. Chou,et al. Growth of straight silicon nanowires on amorphous substrates with uniform diameter, length, orientation, and location using nanopatterned host-mediated catalyst. , 2011, Nano letters.
[8] T. Oates,et al. Combinatorial surface-enhanced raman spectroscopy and spectroscopic ellipsometry of silver Island films , 2009 .
[9] Peidong Yang,et al. Light trapping in silicon nanowire solar cells. , 2010, Nano letters.
[10] Miko Elwenspoek,et al. The black silicon method: a universal method for determining the parameter setting of a fluorine-based reactive ion etcher in deep silicon trench etching with profile control , 1995 .
[11] C. Thompson,et al. Cobalt nanoparticle arrays made by templated solid-state dewetting. , 2009, Small.
[12] C. Ong,et al. Optical absorption measurements of band-gap shrinkage in moderately and heavily doped silicon , 1991 .
[13] C. Pan,et al. Improved broadband and quasi-omnidirectional anti-reflection properties with biomimetic silicon nanostructures. , 2007, Nature nanotechnology.
[14] J. Wagner. Photoluminescence and excitation spectroscopy in heavily doped n- and p-type silicon , 1984 .
[15] Takahisa Kato,et al. Nanoparticle formation in Au thin films by electron-beam-induced dewetting , 2008, Nanotechnology.
[16] Hartmut S. Leipner,et al. Model for the Mass Transport during Metal-Assisted Chemical Etching with Contiguous Metal Films As Catalysts , 2012 .
[17] Tseung-Yuen Tseng,et al. Copper-catalyzed ZnO nanowires on silicon (100) grown by vapor-liquid-solid process , 2003 .
[18] A. Majumdar,et al. Enhanced Thermoelectric Performance of Rough Silicon Nanowires. , 2008 .
[19] K. R. Williams,et al. Etch rates for micromachining processing-Part II , 2003 .
[20] N. Fang,et al. Non-lithographic patterning and metal-assisted chemical etching for manufacturing of tunable light-emitting silicon nanowire arrays , 2010, CLEO/QELS: 2010 Laser Science to Photonic Applications.
[21] Zhipeng Huang,et al. Metal‐Assisted Chemical Etching of Silicon: A Review , 2011, Advanced materials.
[22] Zhipeng Huang,et al. Extended arrays of vertically aligned sub-10 nm diameter [100] Si nanowires by metal-assisted chemical etching. , 2008, Nano letters.
[23] M. D. de Boer,et al. Black silicon method X: a review on high speed and selective plasma etching of silicon with profile control: an in-depth comparison between Bosch and cryostat DRIE processes as a roadmap to next generation equipment , 2009 .
[24] William A. Goddard,et al. Silicon Nanowires as Efficient Thermoelectric Materials. , 2008 .
[25] X. Li,et al. Metal-assisted chemical etching in HF Õ H 2 O 2 produces porous silicon , 2000 .
[26] Sebastian Strobel,et al. Sub-10 nm structures on silicon by thermal dewetting of platinum , 2010, Nanotechnology.
[27] Nadine Geyer,et al. Metal‐Assisted Chemical Etching of Silicon , 2011 .
[28] Ian M Povey,et al. The Langmuir‐Blodgett Approach to Making Colloidal Photonic Crystals from Silica Spheres , 2010, Advanced materials.
[29] E Koren,et al. Obtaining uniform dopant distributions in VLS-grown Si nanowires. , 2011, Nano letters.
[30] Peng Wang,et al. High-resolution detection of Au catalyst atoms in Si nanowires. , 2008, Nature nanotechnology.
[31] Charles F. Zukoski,et al. Preparation of monodisperse silica particles: control of size and mass fraction , 1988 .
[32] A. Vijayaraghavan,et al. Directed self-assembly of block copolymers for use in bit patterned media fabrication , 2013 .
[33] Kenji Fukuda,et al. Ordered Metal Nanohole Arrays Made by a Two-Step Replication of Honeycomb Structures of Anodic Alumina , 1995, Science.
[34] Xiuling Li,et al. Metal-assisted chemical etching in HF/H2O2 produces porous silicon , 2000 .
[35] Yi Cui,et al. Wafer-scale silicon nanopillars and nanocones by Langmuir-Blodgett assembly and etching , 2008 .
[36] Candace K. Chan,et al. High-performance lithium battery anodes using silicon nanowires. , 2008, Nature nanotechnology.
[37] Xiuling Li,et al. Metal assisted chemical etching for high aspect ratio nanostructures: A review of characteristics and applications in photovoltaics , 2012 .
[38] Fabrication of vertically aligned Si nanowires on Si (100) substrates utilizing metal-assisted etching , 2010 .