Process Flow Simulation and Manufacture of Variable RF MEMS Capacitors

Page 4 August 2005 August 2005 Page 5 The Simulation Standard Introduction The application of microelectromechanical systems (MEMS) to radio-frequency (RF)/microwave systems is on the verge of revolutionizing wireless communications, mainly in the areas of wireless personal communication systems, wireless local area networks, satellite communications, and automotive electronics [1]. In this article we present a brief introduction to the design and fabrication effort at the Engineering Department, University of Cambridge, which is focused on variable RF capacitor MEMS structures. Silvaco 2D/3D process simulation was used to simulate the process fl ow and reproduce the obtained structures as a fi rst step to future process fl ow and structure designs. Process Flow Simulation and Manufacture of Variable RF MEMS Capacitors