Enhancing the Performance of Solution-Processed Thin-Film Transistors via Laser Scanning Annealing

In this article, laser scanning annealing is used for the fabrication of solution-processed tungsten–zinc–tin-oxide thin-film transistors (WZTO TFTs) with low temperatures and fast processing. The ...

[1]  Kuniaki Okada,et al.  High refresh rate and low power consumption AMOLED panel using top‐gate n‐oxide and p‐LTPS TFTs , 2020, Journal of the Society for Information Display.

[2]  Jin Jang,et al.  Low‐Temperature Polysilicon Oxide Thin‐Film Transistors with Coplanar Structure Using Six Photomask Steps Demonstrating High Inverter Gain of 264 V V−1 , 2020, Advanced Engineering Materials.

[3]  T. Guo,et al.  Solution-Processed Oxide Complementary Inverter via Laser Annealing and Inkjet Printing , 2019, IEEE Transactions on Electron Devices.

[4]  Jin Jang,et al.  High Speed and Wider Swing, Level Shifter Using Low-Temperature Poly-Silicon Oxide TFTs , 2019, IEEE Electron Device Letters.

[5]  T. Guo,et al.  Low-temperature solution-processed flexible metal oxide thin-film transistors via laser annealing , 2019, Journal of Physics D: Applied Physics.

[6]  Jianhua Zhang,et al.  High-Performance 1-V ZnO Thin-Film Transistors With Ultrathin, ALD-Processed ZrO2 Gate Dielectric , 2019, IEEE Transactions on Electron Devices.

[7]  Chin-Wei Lin,et al.  39‐3: Invited Paper: LTPO TFT Technology for AMOLEDs † , 2019, SID Symposium Digest of Technical Papers.

[8]  P. Fan,et al.  Ultraviolet laser damage mechanisms of amorphous InGaZnO4 thin films , 2019, Optical Materials Express.

[9]  Jin Jang,et al.  A High-Gain Inverter With Low-Temperature Poly-Si Oxide Thin-Film Transistors , 2019, IEEE Electron Device Letters.

[10]  P. Fan,et al.  Optical and electrical properties of In2MgO4 thin film for transistors , 2018, Optical Materials Express.

[11]  W. Lei,et al.  High sensitive solar blind phototransistor based on ZnO nanorods/IGZO heterostructure annealed by laser , 2018, Materials Letters.

[12]  Jiang Shu,et al.  Improvement of the long-term stability of ZnSnO thin film transistors by tungsten incorporation using a solution-process method , 2018, RSC advances.

[13]  P. Edwards,et al.  Low temperature sputter-deposited ZnO films with enhanced Hall mobility using excimer laser post-processing , 2017 .

[14]  T. Guo,et al.  Solution-processed metal oxide arrays using femtosecond laser ablation and annealing for thin-film transistors , 2017 .

[15]  Y. Uraoka,et al.  H and Au diffusion in high mobility a-InGaZnO thin-film transistors via low temperature KrF excimer laser annealing , 2017 .

[16]  Yong‐Hoon Kim,et al.  Chemical durability engineering of solution-processed oxide thin films and its application in chemically-robust patterned oxide thin-film transistors , 2017 .

[17]  D. Hwang,et al.  Femtosecond laser patterning, synthesis, defect formation, and structural modification of atomic layered materials , 2016 .

[18]  M. Mativenga,et al.  Low temperature polycrystalline silicon with single orientation on glass by blue laser annealing , 2016 .

[19]  Y. Uraoka,et al.  Nano-crystallization in ZnO-doped In2O3 thin films via excimer laser annealing for thin-film transistors , 2016 .

[20]  G. Tröster,et al.  Metal oxide semiconductor thin-film transistors for flexible electronics , 2016 .

[21]  Jin Jang,et al.  High performance p-type NiOx thin-film transistor by Sn doping , 2016 .

[22]  Y. Rim,et al.  Recent Progress in Materials and Devices toward Printable and Flexible Sensors , 2016, Advanced materials.

[23]  Jin Jang,et al.  Stable and High-Performance Indium Oxide Thin-Film Transistor by Ga Doping , 2016, IEEE Transactions on Electron Devices.

[24]  Y. Uraoka,et al.  Effect of excimer laser annealing on a-InGaZnO thin-film transistors passivated by solution-processed hybrid passivation layers , 2016 .

[25]  M. Mativenga,et al.  Lateral Grain Growth of Amorphous Silicon Films With Wide Thickness Range by Blue Laser Annealing and Application to High Performance Poly-Si TFTs , 2016, IEEE Electron Device Letters.

[26]  Yana Gao,et al.  Influence of annealing temperatures on solution-processed AlInZnO thin film transistors , 2015 .

[27]  M. Thompson,et al.  High mobility amorphous InGaZnO4 thin film transistors formed by CO2 laser spike annealing , 2015 .

[28]  Taesoon Park,et al.  Excimer laser sintering of indium tin oxide nanoparticles for fabricating thin films of variable thickness on flexible substrates , 2015 .

[29]  Chien-Hung Wu,et al.  High-Mobility InGaZnO TFTs Using Atmospheric Pressure Plasma Jet Technique and 248-nm Excimer Laser Annealing , 2014, IEEE Electron Device Letters.

[30]  Hai Lu,et al.  Large-Swing a-IGZO Inverter With a Depletion Load Induced by Laser Annealing , 2014, IEEE Electron Device Letters.

[31]  W. Lee,et al.  Room-temperature fabrication of ultra-thin ZrOx dielectric for high-performance InTiZnO thin-film transistors , 2014 .

[32]  Jin Jang,et al.  Light/negative bias stress instabilities in indium gallium zinc oxide thin film transistors explained by creation of a double donor , 2012 .

[33]  Yong-Young Noh,et al.  Flexible metal-oxide devices made by room-temperature photochemical activation of sol–gel films , 2012, Nature.

[34]  Jooho Moon,et al.  Solution-processable tin-doped indium oxide with a versatile patternability for transparent oxide thin film transistors , 2011 .

[35]  N. Xu,et al.  Electrical and Photosensitive Characteristics of a-IGZO TFTs Related to Oxygen Vacancy , 2011, IEEE Transactions on Electron Devices.

[36]  Dong Lim Kim,et al.  Effect of Zr addition on ZnSnO thin-film transistors using a solution process , 2010 .

[37]  Dong Lim Kim,et al.  The effect of La in InZnO systems for solution-processed amorphous oxide thin-film transistors , 2010 .

[38]  B. Bae,et al.  Postannealing Process for Low Temperature Processed Sol-Gel Zinc Tin Oxide Thin Film Transistors , 2010 .

[39]  S. S. Yang,et al.  Characteristic Enhancement of Solution-Processed In–Ga–Zn Oxide Thin-Film Transistors by Laser Annealing , 2010, IEEE Electron Device Letters.

[40]  H. Zan,et al.  Low Temperature Annealing with Solid-State Laser or UV Lamp Irradiation on Amorphous IGZO Thin-Film Transistors , 2010 .