Statistical Experimental Design

A designed experiment is a test or series of tests which involve purposeful changes to these variables in order to observe the effect of the changes on that process or product. Statistical experimental design is an efficient approach for systematically varying these controllable process variables and ultimately determining their impact on process/product quality. Statistical process control and experimental design are closely interrelated. However, SPC is a passive approach in which a process is monitored and data is collected, whereas experimental design requires active intervention in performing tests on the process under different conditions. Overall, experimental design is a powerful engineering tool for improving a manufacturing process. This chapter illustrates the use of experimental design methods in semiconductor manufacturing.