First application of Cc-corrected imaging for high-resolution and energy-filtered TEM.

Contrast-transfer calculations indicate that C(c) correction should be highly beneficial for high-resolution and energy-filtered transmission electron microscopy. A prototype of an electron optical system capable of correcting spherical and chromatic aberration has been used to verify these calculations. A strong improvement in resolution at an acceleration voltage of 80 kV has been measured. Our first C(c)-corrected energy-filtered experiments examining a (LaAlO(3))(0.3)(Sr(2)AlTaO(6))(0.7)/LaCoO(3) interface demonstrated a significant gain for the spatial resolution in elemental maps of La.

[1]  O. Scherzer The Theoretical Resolution Limit of the Electron Microscope , 1949 .

[2]  H. Rose,et al.  Theory of image formation by inelastically scattered electrons in the electron microscope , 1985 .

[3]  K. Kimoto,et al.  Spatial resolution in EFTEM elemental maps , 1995 .

[4]  A. Thust,et al.  Focal-series reconstruction in HRTEM: simulation studies on non-periodic objects , 1996 .

[5]  Bernd Kabius,et al.  Electron microscopy image enhanced , 1998, Nature.

[6]  Maximilian Haider,et al.  Residual wave aberrations in the first spherical aberration corrected transmission electron microscope , 1998 .

[7]  H. Fjellvåg,et al.  Crystal structure, thermal and magnetic properties of La3Co3O8. Phase relations for LaCoO3–δ (0.00≤δ≤0.50) at 673 K , 1998 .

[8]  R. Feynman There's plenty of room at the bottom , 1999 .

[9]  R Kilaas,et al.  Imaging columns of the light elements carbon, nitrogen and oxygen with sub Angstrom resolution. , 2001, Ultramicroscopy.

[10]  Peter Hawkes,et al.  Advances in Imaging and Electron Physics , 2002 .

[11]  P D Nellist,et al.  Direct Sub-Angstrom Imaging of a Crystal Lattice , 2004, Science.

[12]  M. Lehmann,et al.  Off-axis electron holography: Materials analysis at atomic resolution , 2006 .

[13]  Joyce Y. Wong,et al.  Building structure into engineered tissues , 2006 .

[14]  F. Ross,et al.  The morphology and nucleation kinetics of copper islands during electrodeposition , 2006 .

[15]  F. Ross A unique tool for imaging crystal growth , 2006 .

[16]  E A Kenik,et al.  Detection of Single Atoms and Buried Defects in Three Dimensions by Aberration-Corrected Electron Microscope with 0.5-Å Information Limit , 2008, Microscopy and Microanalysis.

[17]  M. Haider,et al.  Prerequisites for a Cc/Cs-corrected ultrahigh-resolution TEM. , 2008, Ultramicroscopy.

[18]  D. Larson,et al.  Performance Advantages of a Modern, Ultra-High Mass Resolution Atom Probe , 2008, Microscopy and Microanalysis.