论文信息 - Influence of CMP damage induced during flattening SiC epitaxial layer on device performances - 字舞流文

Influence of CMP damage induced during flattening SiC epitaxial layer on device performances

J. Senzaki | K. Kojima | H. Okumura | M. Hasegawa | K. Masumoto | Kentaro Ohira | Kenji Kobayashi