论文信息 - Application of Area-Saving RF Test Structure on Mobility Extraction

Application of Area-Saving RF Test Structure on Mobility Extraction

An RF test structure is proposed and its applicability is confirmed by measuring DC characteristics and high frequency characteristics. Effective mobility extraction is also performed to confirm the validity of proposed test structure. The area of suggested test structure consumed on wafer was decreased by more than 50% and its characteristics do not be degraded compared with conventional structure.

Byung-Gook Park | Jong Duk Lee | Hyungcheol Shin | Junsoo Kim | Jaehong Lee

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