Design of optimized SOI slot waveguides for homogeneous optical sensing in near infrared

In this paper a detailed investigation of slot waveguides for optical sensing in near-IR wavelength region is carried out, assuming Silicon-on-Insulator technology. Optimized guided-wave structures are found in terms of high sensitivity (Sh) and low propagation losses (αprop) and design guidelines are clearly selected. A number of possible application fields for environmental monitoring are covered, including gas sensing (gas identification or measure of their physical parameters as pressure) and liquid sensing (as pollutants in water). Influence of fabrication tolerances and wavelength dependence are also studied.

[1]  Francesco Dell'Olio,et al.  Optical sensing by optimized silicon slot waveguides. , 2007, Optics express.

[2]  Antao Chen,et al.  Enhanced Evanescent Confinement in Multiple-Slot Waveguides and Its Application in Biochemical Sensing , 2009, IEEE Photonics Journal.

[3]  M. Lipson,et al.  On-chip gas detection in silicon optical microcavities , 2008, 2008 Conference on Lasers and Electro-Optics and 2008 Conference on Quantum Electronics and Laser Science.

[4]  P. Bienstman,et al.  Label-Free Biosensing With a Slot-Waveguide-Based Ring Resonator in Silicon on Insulator , 2009, IEEE Photonics Journal.

[5]  Chengkuo Lee,et al.  Optical sensing by multiple-slot waveguide microring resonators , 2009, 2009 9th IEEE Conference on Nanotechnology (IEEE-NANO).