Fast phase-shifting technique for 3-D surface micro-topography measurement

Abstract This paper presents a two-step phase-shifting interferometry technique for fast inspection of uniformity of optoelectronic samples. The in-line configuration was applied to make full use of the space-bandwidth product (SBP) of the camera and hence can resolve finer spatial details of the sample. Two-step phase-shifting (TSPS) algorithm was used to reconstruct the object with only two in-line interferograms generated when a quarter wave plate (QWP) is placed in the light path of one arm of the Mach-Zehnder interferometer. Experimental results show that the extracted phases calculated by the TSPS technique match with the phases extracted by the three-step phase-shifting (THSPS) technique.

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