A FRUIT JELLY MEMS ELECTRET POWER GENERATOR

In this paper, a novel MEMS electret power generator is presented. Fruit jelly with super flexibility was utilized as spring supporting structure so that our electret MEMS power generator can scavenge energy from vibration with very low frequency and small acceleration. On the other hand, silicon-based inorganic electret, i.e. PECVD SiO2/Si3N4 double layers electrets, was also applied in MEMS electret power generator in this paper. Our experimental results demonstrate that fruit jelly MEMS electret power generator with PECVD SiO2/Si3N4 double layers electret has excellent sensitivity to the vibrations with frequencies lower than 10Hz and accelerations lower than 0.1g, and exhibits good performance.

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