论文信息 - Growth of aluminum nitride on flat and patterned Si (111) by high temperature halide CVD - 字舞流文

Growth of aluminum nitride on flat and patterned Si (111) by high temperature halide CVD

G. Ferro | R. Boichot | F. Charlot | F. Mercier | M. Chubarov | S. Lay | S. Coindeau | A. Crisci | R. Reboud | T. Encinas | Roman Reboud