Gas-sensing characteristics of one-electrode gas sensors based on doped In2O3 ceramics

Structural and gas-sensing properties of In2O3-based one-electrode gas sensors have been analyzed by their dependence on the doping by oxides of I–VIII group elements. It was found that addition of Cu, Ga, and Zn results in increase of the gas response to CO and H2. Doping by P increases the sensitivity to CH4 and H2. The essential improvement of the selectivity to H2 and CH4 in the environments that contain combustion gases can be reached by modification of In2O3 by Cu, P, and Mn. The influence of air humidity on sensing properties of doped In2O3 has been also studied. It was concluded that doping of In2O3 ceramics leads to the substantial changes both in the film’s resistance and structure that are considered as the main factors controlling the gas response of one-electrode gas sensors.

[1]  Koji Moriya,et al.  Indium oxide-based gas sensor for selective detection of CO , 1996 .

[2]  H. Meixner,et al.  Enhancement of sensitivity and conductivity of semiconducting Ga2O3 gas sensors by doping with SnO2 , 1998 .

[3]  E. Fortunato,et al.  Production and characterization of zinc oxide thin films for room temperature ozone sensing , 2002 .

[4]  S. N. Malchenko,et al.  One-electrode semiconductor sensors for detection of toxic and explosive gases in air , 1992 .

[5]  Tadashi Takada,et al.  Highly sensitive ozone sensor , 1993 .

[6]  Dieter Kohl,et al.  Function and applications of gas sensors , 2001 .

[7]  N. Barsan,et al.  Fundamental and practical aspects in the design of nanoscaled SnO2 gas sensors: a status report , 1999 .

[8]  Yoshifumi Yamamoto,et al.  Sensing properties to dilute chlorine gas of indium oxide based thin film sensors prepared by electron beam evaporation , 2002 .

[9]  S. N. Malchenko,et al.  In2O3-based gas sensors , 1993 .

[10]  U. Weimar,et al.  Understanding the fundamental principles of metal oxide based gas sensors; the example of CO sensing with SnO2 sensors in the presence of humidity , 2003 .

[11]  Koji Moriya,et al.  Mechanism of sensitivity promotion in CO sensor using indium oxide and cobalt oxide , 2000 .

[12]  V. Brynzari,et al.  Theoretical study of semiconductor thin films gas sensors: attempt to consistent approach , 2000 .

[13]  J. E. Griffiths,et al.  Raman scattering study of the thermal oxidation of InP , 1980 .