Modelling NEM relays for digital circuit applications

A reduced-order model for NEM relays is presented that combines electro-mechanical beam actuation and landing of beam tip on the surface electrode. This model shows a deviation of less than 2%, for the DC as well as the transient response for beam actuation in a circuit simulation, when compared to a finite-element simulation. It also shows an excellent match for the energy. The model allows accurate circuit simulation to aid in NEM-relay based logic design, and facilitates the quantification of key gate-level metrics.

[1]  H.-S. Philip Wong,et al.  Efficient FPGAs using nanoelectromechanical relays , 2010, FPGA '10.

[2]  Kaustav Banerjee,et al.  Design and analysis of compact ultra Energy-Efficient logic gates using laterally-actuated double-electrode NEMS , 2010, Design Automation Conference.

[3]  Owen Y Loh,et al.  Nanoelectromechanical contact switches. , 2012, Nature nanotechnology.

[4]  Elad Alon,et al.  Demonstration of Integrated Micro-Electro-Mechanical Relay Circuits for VLSI Applications , 2011, IEEE Journal of Solid-State Circuits.

[5]  S.D. Senturia,et al.  Computer-aided generation of nonlinear reduced-order dynamic macromodels. I. Non-stress-stiffened case , 2000, Journal of Microelectromechanical Systems.

[6]  Hossein Fariborzi,et al.  Design and demonstration of micro-electro-mechanical relay multipliers , 2011, IEEE Asian Solid-State Circuits Conference 2011.

[7]  Yao-Joe Yang,et al.  Low-order models for fast dynamical simulation of MEMS microstructures , 1997, Proceedings of International Solid State Sensors and Actuators Conference (Transducers '97).

[8]  Kaustav Banerjee,et al.  A new paradigm in the design of energy-efficient digital circuits using laterally-actuated double-gate NEMS , 2010, 2010 ACM/IEEE International Symposium on Low-Power Electronics and Design (ISLPED).

[9]  S. Mitra,et al.  Dual sidewall lateral nanoelectromechanical relays with beam isolation , 2011, 2011 16th International Solid-State Sensors, Actuators and Microsystems Conference.