Competition between subwavelength and deep-subwavelength structures ablated by ultrashort laser pulses

Femtosecond laser-induced periodic subwavelength and deep-subwavelength structures (SWS; DSWS) have attracted attention due to their subdiffraction resolution of surface and inner volume patterning. Understanding of the richness of laser–matter interaction during formation of SWS and DSWS is another quest which can help to find control for nanoscale fabrication. Lack of control over SWS and DSWS formation has impacted their wider use and calls for a deeper insight into the relationship between them. Herein we present a systematic study defining a criterion for imprinting either SWS or DSWS, which is based on a competition and their mutual incompatibility discriminated by the laser fluence and pulse accumulation. Structure evolution of SWS and DSWS is highly dependent on the localized effective laser fluence, which determines the instantaneous optical permittivity by the laser-excited electrons creating an active plasma layer. The proposed universal SWS and DSWS competition mechanism involving the laser-induced plasma wave at the plasma–substrate interface ties together many previous observations and unifies the discussed mechanisms of surface nanoripple formation.

[1]  Ronan Le Harzic,et al.  Sub-100 nm nanostructuring of silicon by ultrashort laser pulses. , 2005, Optics express.

[2]  T. Jia,et al.  Direct writing of 150 nm gratings and squares on ZnO crystal in water by using 800 nm femtosecond laser. , 2014, Optics express.

[3]  S. Juodkazis,et al.  Surface and bulk structuring of materials by ripples with long and short laser pulses: Recent advances , 2014 .

[4]  E. Mazur,et al.  The thresholds of surface nano-/micro-morphology modifications with femtosecond laser pulse irradiations , 2010, Nanotechnology.

[5]  Costas Fotakis,et al.  From ripples to spikes: A hydrodynamical mechanism to interpret femtosecond laser-induced self-assembled structures , 2015, 1505.04381.

[6]  Lan Jiang,et al.  Crystal orientation dependence of femtosecond laser-induced periodic surface structure on (100) silicon. , 2014, Optics letters.

[7]  A. Rosenfeld,et al.  On the role of surface plasmon polaritons in the formation of laser-induced periodic surface structures upon irradiation of silicon by femtosecond-laser pulses , 2009 .

[8]  Y. Yue,et al.  Femtosecond laser induced phenomena in transparent solid materials: Fundamentals and applications , 2016 .

[9]  Shutong Wang,et al.  Microsized structures assisted nanostructure formation on ZnSe wafer by femtosecond laser irradiation , 2014 .

[10]  Klaus Sokolowski-Tinten,et al.  Generation of dense electron-hole plasmas in silicon , 2000 .

[11]  G. Ma,et al.  Discussion of the possible formation mechanism of near-wavelength ripples on silicon induced by femtosecond laser , 2015 .

[12]  Jörg Krüger,et al.  Femtosecond diffraction dynamics of laser-induced periodic surface structures on fused silica , 2013 .

[13]  T. Derrien,et al.  Plasmonic formation mechanism of periodic 100-nm-structures upon femtosecond laser irradiation of silicon in water , 2014 .

[14]  Jeff F. Young,et al.  Laser-induced periodic surface structure. I. Theory , 1983 .

[15]  B. Pourdeyhimi,et al.  Fundamentals and Applications of Micro and Nanofibers: Post-processing , 2014 .

[16]  Y. Shimotsuma,et al.  Self-organized nanogratings in glass irradiated by ultrashort light pulses. , 2003, Physical review letters.

[17]  Lei Wang,et al.  Rapid production of large-area deep sub-wavelength hybrid structures by femtosecond laser light-field tailoring , 2014 .

[18]  Karsten König,et al.  Periodic nanostructures on Si(100) surfaces generated by high-repetition rate sub-15 fs pulsed near-infrared laser light. , 2012, Optics letters.

[19]  M. Birnbaum.  Semiconductor Surface Damage Produced by Ruby Lasers , 1965 .

[20]  R. Kuladeep,et al.  Direct writing of continuous and discontinuous sub-wavelength periodic surface structures on single-crystalline silicon using femtosecond laser , 2014 .

[21]  Lan Jiang,et al.  Femtosecond laser induced tunable surface transformations on (111) Si aided by square grids diffraction , 2015 .

[22]  Zhi‐zhan Xu,et al.  Origin of laser-induced near-subwavelength ripples: interference between surface plasmons and incident laser. , 2009, ACS nano.

[23]  K. Sugioka,et al.  High-fidelity visualization of formation of volume nanogratings in porous glass by femtosecond laser irradiation , 2015 .

[24]  Jörg Krüger,et al.  Femtosecond laser-induced periodic surface structures: recent approaches to explain their sub-wavelength periodicities , 2010, International Conference on Coherent and Nonlinear Optics.

[25]  S. Juodkazis,et al.  Nanoscale Precision of 3D Polymerization via Polarization Control , 2016, 1603.06748.

[26]  Jörg Krüger,et al.  Femtosecond laser-induced periodic surface structures , 2012 .

[27]  Costas Fotakis,et al.  Dynamics of ripple formation on silicon surfaces by ultrashort laser pulses in subablation conditions , 2012 .