论文信息 - Study on preparation of GaN and CoSi2 epitaxial films by mass analyzed low energy dual ion beam epitaxy - 字舞流文

Study on preparation of GaN and CoSi2 epitaxial films by mass analyzed low energy dual ion beam epitaxy

Da-Ding Huang | W. M. Lau | Lan-ying Lin | Fu-Guang Qin | Xiangpeng Wang | Zhi-kai Liu | Zhen-Yu Yao | Zhiheng Ren