Development and Prospects

This chapter includes 4 separate sections that were written by the prestigious scholars, Professor Richard S. Muller (University of California- Berkeley, USA), Professor Wolfgang Menz (University of Freiburg, Germany), Professor Masayoshi Esashi (Tohoku University, Japan), and Geoff Beardmore (Myraid Technology, UK). They shared their years of experience mainly in the development of MEMS and micro-nano technology, gave an overview of the history, development, and prospect of MEMS. Although from different perspectives, the prospect for MEMS is promising.

[1]  M. Esashi,et al.  Electrostatically Levitated Ring-Shaped Rotational-Gyro/Accelerometer , 2003 .

[2]  M. Dawkins.  From an animal's point of view: Motivation, fitness, and animal welfare , 1990, Behavioral and Brain Sciences.

[3]  David Fraser,et al.  Science, Values and Animal Welfare: Exploring the ‘Inextricable Connection’ , 1995, Animal Welfare.

[4]  Claude E. Shannon,et al.  A mathematical theory of communication , 1948, MOCO.

[5]  P. W. Chapman,et al.  Silicon Diffused-Element Piezoresistive Diaphragms , 1962 .

[6]  D. Broom,et al.  Animal welfare: concepts and measurement. , 1991, Journal of animal science.

[7]  K. Petersen.  A new age for MEMS , 2005, The 13th International Conference on Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05..

[8]  Duncan Ij.  The welfare of farm animals: an ethological approach. , 1987 .

[9]  R. Muller,et al.  Addressable Microlens Array to Improve Dynamic Range of Shack–Hartmann Sensors , 2006, Journal of Microelectromechanical Systems.

[10]  K.E. Petersen,et al.  Silicon as a mechanical material , 1982, Proceedings of the IEEE.

[11]  D. Broom.  Indicators of poor welfare. , 1986, The British veterinary journal.

[12]  H. Nathanson,et al.  The resonant gate transistor , 1967 .

[13]  M. Esashi.  Encapsulated micro mechanical sensors , 1994 .

[14]  A. Fraser,et al.  Farm Animal Behaviour and Welfare , 1990 .

[15]  G. Wallis,et al.  Field Assisted Glass‐Metal Sealing , 1969 .

[16]  Charles S. Smith.  Piezoresistance Effect in Germanium and Silicon , 1954 .

[17]  Larry J. Hornbeck,et al.  Digital Light Processing and MEMS: Timely Convergence for a Bright Future , 2002 .

[18]  B. Roberds,et al.  Chemical Free Room Temperature Wafer To Wafer Direct Bonding , 1995 .

[19]  Stanley Finger,et al.  Origins of neuroscience: A history of explorations into brain function. , 1994 .

[20]  Masayoshi Esashi,et al.  Microprobe array with electrical interconnection for thermal imaging and data storage , 2002 .

[21]  S. D. Senturia,et al.  CAD challenges for microsensors, microactuators, and microsystems , 1998, Proc. IEEE.

[22]  D. Broom,et al.  Stress and Animal Welfare , 1993, Springer Netherlands.

[23]  S. Terry,et al.  A gas chromatographic air analyzer fabricated on a silicon wafer , 1979, IEEE Transactions on Electron Devices.

[25]  Masayoshi Esashi,et al.  Ultra-miniature fiber-optic pressure sensor using white light interferometry , 2005 .

[26]  S. Kaplan.  The Physiology of Thought , 1950 .

[27]  W. Ko,et al.  Micromachining and Micropackaging of Transducers , 1986 .

[28]  M. Esashi,et al.  Integrated Micro Multi Ion Sensor Using Field Effect of Semiconductor , 1978, IEEE Transactions on Biomedical Engineering.

[29]  D. Levitin.  This Is Your Brain on Music , 2006 .

[30]  M. Esashi,et al.  Micro-discharge and electric breakdown in a micro-gap , 2000 .