On the preparation of PZT thin films by laser ablation deposition

Abstract Polycrystalline Pb(Ti 0.48 Zr 0.52 )O 3 films were deposited by laser ablation onto glass slides using a Nd:YAG laser. Film thicknesses of 4–8 μm were grown. X-ray diffraction indicated that a heat treatment at 450°C for 6 h is sufficient to recrystallize the perovskite. Scanning electron microscopy reveals that, after this heat treatment, a dense film is obtained with the desired composition.

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