论文信息 - The thermal stability of tungsten silicide contacts to AlGaAs - 字舞流文

The thermal stability of tungsten silicide contacts to AlGaAs

D. Morgan | A. Christou | D. Diskett | H. Thomas | Simon Mcclatchie | B. Marazas

[1] D. Morgan,et al. Refractory and silicide gate metallisations for GaAs MESFET's , 1989 .

[2] D. Morgan,et al. High Temperature Metallisation for GaAs Device Processing , 1988, December 16.