论文信息 - Open-loop operating mode of micromachined capacitive accelerometer

Open-loop operating mode of micromachined capacitive accelerometer

Abstract Electrostatic force is served as a negative feedback in closed-loop operating mode to improve the linear character of micromachined capacitive accelerometer. Its function in open-loop operating mode of the capacitive accelerometer was analyzed in this paper. The derived equations to describe bias related sensitivity are in good agreement with experimental results. Based on this bias technology, an accelerometer originally used in range of ±1 g was successfully operated in a range of ±0.01 g with non-linearity less than 0.2%.

Weiyuan Wang | Deren Lu | Baoqing Li

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