论文信息 - A micromirror for optical projection displays

A micromirror for optical projection displays

In this paper we present a tilting micro mirror with a large mirror surface of up to 2.5 mm x 1.0 mm and a large rotation angle of +/- 10° as needed for optical projection displays. The mirror is driven by vertical comb-drive actuators which are realized by a combination of deep reactive ion etching (DRIE) and a buried mask to provide selfalignment of the stator and rotor fingers in a silicon on insulator (SOI) wafer. Measurement results are shown for various realized mirror designs.

[1] Kazuhiro Hane,et al. Piezoresistive Rotation Angle Sensor Integrated in Micromirror , 2005 .

[2] Kam Y. Lau,et al. A FLAT HIGH-FREQUENCY SCANNING MICROMIRROR , 2000 .

[3] Remco J. Wiegerink,et al. Towards embedded control for resonant scanning MEMS micromirror , 2009 .

[4] Harald Schenk. Ein neuartiger Mikroaktor zur ein- und zweidimensionalen Ablenkung von Licht , 2000 .

[5] H. Schenk,et al. Integrated Piezo-resistive Positionssensor for Microscanning Mirrors , 2007, 2007 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics.

[6] Chi-Hoon Jun,et al. A self-aligned vertical comb-drive actuator on an SOI wafer for a 2D scanning micromirror , 2004 .

[7] Wibool Piyawattanametha,et al. Scanning micromirrors: an overview , 2004, SPIE Optics East.

[8] CMOS-Compatible 2-Axis Self-Aligned Vertical Comb-Driven Micromirror for Large Field-of-View Microendoscopes , 2009, 2009 IEEE 22nd International Conference on Micro Electro Mechanical Systems.

[9] Herman Soemers,et al. Design and fabrication of a MEMS mirror for miniature laser projection , 2009, MOEMS-MEMS.