On roughness measurement by angular speckle correlation

In this w ork, the influence of both characteristics of the le ns and misalignment of the incident beams on roughness measurement is presented. To investigate how the fo cal length and diameter affect the degree of correlation between the speckle patterns, a set of experiments with different lenses is performed. On the other hand, the roughness when the beams separated by an amount are non-coincident at the same point on the sample is measured. To conclude the study, the uncertainty of the me thod is calculated.

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