论文信息 - Nearly defect-free Ge gate-all-around FETs on Si substrates - 字舞流文

Nearly defect-free Ge gate-all-around FETs on Si substrates

C. Hu | P. Sung | G. Luo | Fu-Liang Yang | Hung-Chih Chang | C. Chu | Yen‐Ting Chen | W. Tu | C. W. Liu | Shu‐Han Hsu | Yen-chun Fu | W. Hsu | Li-Yaw Cho