High-accuracy aspheric x-ray mirror metrology using Software Configurable Optical Test System/deflectometry

Abstract. The Software Configurable Optical Test System (SCOTS) uses deflectometry to measure surface slopes of general optical shapes without the need for additional null optics. Careful alignment of test geometry and calibration of inherent system error improve the accuracy of SCOTS to a level where it competes with interferometry. We report a SCOTS surface measurement of an off-axis superpolished elliptical x-ray mirror that achieves <1  nm root-mean-square accuracy for the surface measurement with low-order term included.

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