3D micro-fabricated high-Q 140 GHz filter

This paper introduces a new fabrication process for the realization of cavity resonators and band pass filters, using additive micro fabrication. 3D air-filled structures with a 195 μm thickness are obtained by using successive electroplating. Thanks to this fabrication process, a 140 GHz cavity resonator with an unloaded quality factor of 511 has been fabricated. A four-pole band pass filter at 140 GHz is presented, with a 3.1% bandwidth at −3 dB, and measured 3.7 dB in-band loss. Measurements are in good agreement with HFSS simulations without any post-processing tuning.

[1]  Z. Popovic,et al.  Modeling, Design, Fabrication, and Performance of Rectangular μ-Coaxial Lines and Components , 2006, 2006 IEEE MTT-S International Microwave Symposium Digest.

[2]  Sanjay Raman,et al.  Ka-band surface-mount directional coupler fabricated using micro-rectangular coaxial transmission lines , 2008, 2008 IEEE MTT-S International Microwave Symposium Digest.

[3]  Pierre Blondy,et al.  Two-pole micromachined bandpass filter at 150 ghz with 4% 3 db bandwidth , 2010 .

[4]  Yi Wang,et al.  Micromachined 38 GHz cavity resonator and filter with rectangular-coaxial feed-lines , 2009 .

[5]  M. Bozzi,et al.  Compact filter solutions in substrate integrated waveguide (SIW) technology , 2016, 2016 IEEE International Workshop on Electromagnetics: Applications and Student Innovation Competition (iWEM).

[6]  U. Prechtel,et al.  High Q Micro-machined Cavity Resonator Filter in Low-Cost Silicon Technology , 2008, 2008 38th European Microwave Conference.

[7]  Zoya Popovic.  Micro-coaxial micro-fabricated feeds for phased array antennas , 2010, 2010 IEEE International Symposium on Phased Array Systems and Technology.

[8]  J. R. Reid,et al.  Micromachined rectangular-coaxial transmission lines , 2006, IEEE Transactions on Microwave Theory and Techniques.

[9]  Yong-Kweon Kim,et al.  A Monolithic Surface Micromachined Half-Coaxial Transmission Line Filter , 2006, 19th IEEE International Conference on Micro Electro Mechanical Systems.

[10]  I. Ohta,et al.  Fabrication of 180 GHz PTFE-filled waveguide and its bandpass filters by SR direct etching , 2014, 2014 Asia-Pacific Microwave Conference.

[11]  Hong Wang,et al.  A 390 ps On-Wafer True-Time-Delay Line Developed by a Novel Micro-Coax Technology , 2014, IEEE Microwave and Wireless Components Letters.

[12]  P. Blondy,et al.  Surface-Micromachined Rectangular Micro-Coaxial Lines for Sub-Millimeter-Wave Applications , 2016, IEEE Microwave and Wireless Components Letters.

[13]  N. A. Sutton,et al.  Wideband 18–40 GHz Surface Micromachined Branchline Quadrature Hybrid , 2012, IEEE Microwave and Wireless Components Letters.