Invited) Integration Challenges of Ferroelectric Hafnium Oxide Based Embedded Memory
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Stefan Slesazeck | Halid Mulaosmanovic | Thomas Mikolajick | Jan Paul | Jan Paul | Stefan Müller | Joachim Metzger | Dina H. Triyoso | Robert Binder | Halid Mulaosmanovic | Uwe Schröder | Patrick Polakowski | Thomas Mikolajick | Johannes Müller | Elke Erben | R. Hoffmann | Sabine Kolodinski | Dina H. Triyoso | Patrick Polakowski | Stefan Riedel | Uwe Schröder | Maximilian Drescher | Stefan Flachowsky | Elke Erben | Elliot John Smith | Sabine Kolodinski | Johannes Müller | Elliot John Smith | Stefan Müller | Maximilian Drescher