Precision positioning method for rapid compensation of in-place errors of motion mechanism and apparatus thereof

Provided is a precision positioning method for rapid compensation of in-place errors of a motion mechanism and an apparatus thereof. The apparatus comprises a compensation element used for compensating the positioning precision, a base used for placing the motion mechanism, a position detecting device used for detecting the positioning precision, and a control system used for controlling the operation of the whole positioning compensation control, the compensation element is arranged on the motion mechanism, and the position detecting device is arranged on the base and the compensation element. According to the method and the apparatus, aiming to the in-place error problem of the precision motion mechanism, dynamic, adjustable, and accurate compensation of the in-place errors of the motion mechanism is continuously and rapidly provided by employing precise and reciprocating feeding movement of the compensation element, the positioning precision of the motion mechanism is improved, and in-place oscillation and the positioning time of the motion mechanism are effectively reduced.