论文信息 - Dynamics of Silicon Micro-Heaters: Modelling and Experimental Identification

Dynamics of Silicon Micro-Heaters: Modelling and Experimental Identification

In this paper we present a novel tractable feedback model that captures the thermo-electric dynamics of silicon micro-heaters. The validity of the model is demonstrated using an analytical derivation from physical principles. Furthermore the model is applied to the synthesis of specific temperature profiles.

A. Sebastian | A. Sebastian | D. Wiesmann | D. Wiesmann

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