Analysis and Experiment of Micro-vibration Active Control Based on a Stewart Platform

With the piezoelectric stack as an active element, a cubic Stewart platform is constructed. The digital control system based on DSP and Fx-LMS algorithms is adopted to suppress the foundation vibration. The input and output channel identification system and the active control module are tested. And the vibration isolation effect of the Stewart platform is verified. The results show that for the tonal disturbance ranged from 10 Hz to 100 Hz, the Stewart platform can achieve 24 dB attenuation effect. The platform also performs well under a mixed disturbance condition.