Quantum device-simulation with the density-gradient model on unstructured grids

We describe an implementation of the density-gradient device equations which is simple and works in any dimension without imposing additional requirements on the mesh compared to classical simulations. It is therefore applicable to real-world device simulation with complex geometries. We use our implementation to determine the quantum mechanical effects for a MOS-diode, a MOSFET and a double-gated SOI MOSFET. The results are compared to those obtained by a 1D-Schrodinger-Poisson solver. We also investigate a simplified variant of the density-gradient term and show that, while it can reproduce terminal characteristics, it does not give the correct density distribution inside the device.

[1]  H. Gummel,et al.  Large-signal analysis of a silicon Read diode oscillator , 1969 .

[2]  F. Stern Self-Consistent Results for n -Type Si Inversion Layers , 1972 .

[3]  S. Selberherr Analysis and simulation of semiconductor devices , 1984 .

[4]  M. Ancona,et al.  Macroscopic physics of the silicon inversion layer. , 1987, Physical review. B, Condensed matter.

[5]  G. Iafrate,et al.  Quantum correction to the equation of state of an electron gas in a semiconductor. , 1989, Physical review. B, Condensed matter.

[6]  David K. Ferry,et al.  Ballistic phenomena in GaAs MESFETs: modelling with quantum moment equations , 1992 .

[7]  J. P. Kreskovsky,et al.  Transport via the Liouville equation and moments of quantum distribution functions , 1993 .

[8]  P. Woerlee,et al.  A simple model for quantisation effects in heavily-doped silicon MOSFETs at inversion conditions , 1994 .

[9]  Carl L. Gardner,et al.  The Quantum Hydrodynamic Model for Semiconductor Devices , 1994, SIAM J. Appl. Math..

[10]  Bernardo Cockburn,et al.  Quantum hydrodynamic simulation of hysteresis in the resonant tunneling diode at 300 K , 1995, Journal of Computational Electronics.

[11]  Gardner,et al.  Smooth quantum potential for the hydrodynamic model. , 1996, Physical review. E, Statistical physics, plasmas, fluids, and related interdisciplinary topics.

[12]  R. Dutton,et al.  Simulation of quantum confinement effects in ultra-thin-oxide MOS structures , 1996, Journal of Technology Computer Aided Design TCAD.

[13]  Zhangxin Chen A finite element method for the quantum hydrodynamic model for semiconductor devices , 1996 .

[14]  J. L. Lentz,et al.  An improved electron and hole mobility model for general purpose device simulation , 1997 .

[15]  Christian A. Ringhofer,et al.  Smooth Quantum Hydrodynamic Model Simulation of the Resonant Tunneling Diode , 1998, VLSI Design.

[16]  Density-gradient analysis of tunneling in MOS structures with ultra-thin oxides , 1999, 1999 International Conference on Simulation of Semiconductor Processes and Devices. SISPAD'99 (IEEE Cat. No.99TH8387).

[17]  Numerical simulation of the smooth quantum hydrodynamic model for semiconductor devices , 2000 .

[18]  C. Gardner,et al.  Resonant tunneling in the smooth quantum hydrodynamic model for semiconductor devices , 2000 .