Beyond Pull-In Stabilization of Dual Axis Micromirrors Using Fuzzy Controllers

Dual axis micromirrors are actuated using strongly nonlinear electrostatic actuation and their operating range suffers from the pull-in problem. So investigation of their dynamics and control issues has become a challenge for the researchers. The current paper makes use of fuzzy controllers for the purpose of stabilizing the dual axis micromirror at the desired tilt angles beyond pull-in. At first the dynamic model of the micromirror is presented. Then for the purpose of finding the linguistic laws governing the system behavior, several step voltages are introduced to the system. The proposed fuzzy controller consists of singleton fuzzifier, product inference engine and center average defuzzifier. It was observed from the simulation results that the presented controller can effectively and immediately stabilize and control the micromirror tilt angles beyond pull-in, with a short rise time and also a short overshoot.Copyright © 2010 by ASME

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