Compact equivalent circuit model of two-layer spiral inductors

A compact lumped-element equivalent circuit model of two-layer integrated spiral inductors on silicon substrates is developed in this article. Based on this proposed model, excellent agreements are achieved between the measured and simulated S-parameters for different inductors. Also, both self- and mutual inductances of two-layer inductors are accurately extracted, and their overall performances are understood clearly. © 2003 Wiley Periodicals, Inc. Int J RF and Microwave CAE 13: 148–153, 2003.

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