PVDF-excited resonance sensors for gas flow and humidity measurements

Abstract A mechanical resonator made of a thin glass plate driven by piezoelectric PVDF polymer foils is charaterized with respect to its application for measurements of the density of gases, of humidity in air using a hygroscopic coverage layer and of the velocity of streaming air. A particular mode of vibrational deflection of the plate was chose (2/0mode), which provided high sensitivity and easy detectability.